{"id":920,"date":"2024-04-10T09:37:59","date_gmt":"2024-04-10T01:37:59","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=920"},"modified":"2024-04-10T09:41:15","modified_gmt":"2024-04-10T01:41:15","slug":"920","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=920","title":{"rendered":"TiZrN\u6d82\u5c42\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u6280\u672f"},"content":{"rendered":"\n

\u6b22\u8fce\u5149\u4e34\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u771f\u7a7a\u9540\u819c\u6709\u9650\u516c\u53f8\uff01\u6211\u4eec\u4f5c\u4e3a\u4e00\u5bb6\u4e13\u4e1a\u7684\u771f\u7a7a\u9540\u819c\u516c\u53f8\uff0c\u81f4\u529b\u4e8e\u4e3a\u60a8\u63d0\u4f9b\u9ad8\u54c1\u8d28\u7684PVD\u6d82\u5c42\u670d\u52a1\u3002\u4eca\u5929\uff0c\u6211\u5c06\u4e3a\u60a8\u4ecb\u7ecd\u6211\u4eec\u7684\u4e00\u6b3e\u9ad8\u8d28\u91cf\u8868\u9762\u79bb\u5b50\u9540\u819c\u4ea7\u54c1\u2014\u2014TiZrN\u6d82\u5c42\u3002\u8fd9\u6b3e\u6d82\u5c42\u5177\u6709\u826f\u597d\u7684\u8010\u78e8\u8010\u8150\u8680\u6027\u80fd\uff0c\u6211\u4eec\u53ef\u4ee5\u4e3a\u60a8\u5b9a\u5236\u9540\u5c42\u989c\u8272\u548c\u539a\u5ea6\u3002<\/p>\n\n\n\n

TiZrN\u6d82\u5c42\u662f\u4e00\u79cd\u65b0\u578b\u7684\u8868\u9762\u6d82\u5c42\u6280\u672f\uff0c\u5177\u6709\u5e7f\u6cdb\u7684\u5e94\u7528\u524d\u666f\u548c\u4f18\u8d8a\u7684\u6027\u80fd\u7279\u70b9\u3002\u672c\u6587\u5c06\u4ecb\u7ecdTiZrN\u6d82\u5c42\u7684\u5236\u5907\u65b9\u6cd5\u3001\u7279\u6027\u4ee5\u53ca\u5e94\u7528\u9886\u57df\u3002<\/p>\n\n\n\n

TiZrN\u6d82\u5c42\u662f\u7531\u949b(Ti)\u3001\u9506(Zr)\u548c\u6c2e(N)\u5143\u7d20\u7ec4\u6210\u7684\u5316\u5408\u7269\u6d82\u5c42\uff0c\u6211\u4eec\u901a\u8fc7\u7269\u7406\u6c14\u76f8\u6c89\u79ef(PVD)\u6280\u672f\u5236\u5907\u3002\u8be5\u6d82\u5c42\u5177\u6709\u6781\u9ad8\u7684\u786c\u5ea6\u3001\u4f18\u5f02\u7684\u8010\u78e8\u6027\u548c\u8010\u8150\u8680\u6027\uff0c\u80fd\u591f\u6709\u6548\u4fdd\u62a4\u57fa\u6750\u8868\u9762\u514d\u53d7\u78e8\u635f\u548c\u8150\u8680\u7684\u5f71\u54cd\u3002\u6b64\u5916\uff0cTiZrN\u6d82\u5c42\u8fd8\u5177\u6709\u826f\u597d\u7684\u70ed\u7a33\u5b9a\u6027\u548c\u5316\u5b66\u7a33\u5b9a\u6027\uff0c\u80fd\u591f\u5728\u9ad8\u6e29\u548c\u8150\u8680\u73af\u5883\u4e0b\u4fdd\u6301\u7a33\u5b9a\u7684\u6027\u80fd\u3002<\/p>\n\n\n\n

TiZrN\u6d82\u5c42\u5728\u5de5\u4e1a\u9886\u57df\u5177\u6709\u5e7f\u6cdb\u7684\u5e94\u7528\u524d\u666f\uff0c\u7279\u522b\u9002\u7528\u4e8e\u5200\u5177\u3001\u6a21\u5177\u3001\u6c7d\u8f66\u96f6\u90e8\u4ef6\u7b49\u9886\u57df\u3002\u7531\u4e8e\u5176\u4f18\u5f02\u7684\u6027\u80fd\u7279\u70b9\uff0cTiZrN\u6d82\u5c42\u80fd\u591f\u663e\u8457\u63d0\u9ad8\u5de5\u4ef6\u7684\u8010\u78e8\u6027\u3001\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\uff0c\u5e76\u51cf\u5c11\u7ef4\u62a4\u6210\u672c\u3002\u6b64\u5916\uff0cTiZrN\u6d82\u5c42\u8fd8\u53ef\u4ee5\u63d0\u9ad8\u5de5\u4ef6\u7684\u8868\u9762\u8d28\u91cf\u548c\u52a0\u5de5\u7cbe\u5ea6\uff0c\u63d0\u9ad8\u5de5\u4ef6\u7684\u751f\u4ea7\u6548\u7387\u548c\u52a0\u5de5\u8d28\u91cf\u3002<\/p>\n\n\n\n

\u603b\u7684\u6765\u8bf4\uff0cTiZrN\u6d82\u5c42\u662f\u4e00\u79cd\u5177\u6709\u5e7f\u6cdb\u5e94\u7528\u524d\u666f\u548c\u4f18\u8d8a\u6027\u80fd\u7279\u70b9\u7684\u8868\u9762\u6d82\u5c42\u6280\u672f\u3002\u901a\u8fc7\u8fdb\u4e00\u6b65\u7814\u7a76\u548c\u5f00\u53d1\uff0cTiZrN\u6d82\u5c42\u5c06\u5728\u5de5\u4e1a\u9886\u57df\u53d1\u6325\u66f4\u5927\u7684\u4f5c\u7528\uff0c\u5e76\u4e3a\u5de5\u4ef6\u7684\u8868\u9762\u4fdd\u62a4\u548c\u6027\u80fd\u63d0\u5347\u63d0\u4f9b\u6709\u6548\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n\n\n\n

\u6700\u540e\uff0c\u6211\u4eec\u6765\u5173\u6ce8\u4e00\u4e0b\u9540\u5c42\u7684\u539a\u5ea6\u3002\u6211\u4eec\u7684TiZrN\u6d82\u5c42\u539a\u5ea6\u8303\u56f4\u4ece20nm\u52301000nm\uff0c\u8fd9\u610f\u5473\u7740\u60a8\u53ef\u4ee5\u6839\u636e\u81ea\u5df1\u7684\u9700\u6c42\u9009\u62e9\u4e0d\u540c\u7684\u539a\u5ea6\u6765\u8fbe\u5230\u7406\u60f3\u7684\u6548\u679c\u3002\u8f83\u8584\u7684\u6d82\u5c42\u53ef\u4ee5\u8d4b\u4e88\u6212\u6307\u66f4\u9ad8\u7684\u5149\u6cfd\u5ea6\u548c\u5149\u6ed1\u5ea6\uff0c\u4f7f\u5176\u66f4\u52a0\u7f8e\u89c2\uff1b\u800c\u8f83\u539a\u7684\u6d82\u5c42\u53ef\u4ee5\u589e\u52a0\u5176\u8010\u78e8\u6027\u548c\u8010\u8150\u8680\u6027\u3002<\/p>\n\n\n\n

\u9664\u4e86\u4ee5\u4e0a\u4ecb\u7ecd\u7684\u7279\u70b9\uff0c\u6211\u4eec\u8fd8\u8981\u5f3a\u8c03\u6211\u4eec\u4ea7\u54c1\u7684\u54c1\u8d28\u548c\u53ef\u9760\u6027\u3002\u6211\u4eec\u91c7\u7528\u7684\u591a\u5f27\u79bb\u5b50\u9540\u819c\u6280\u672f\uff0c\u786e\u4fdd\u4e86\u6d82\u5c42\u7684\u5747\u5300\u6027\u548c\u9644\u7740\u529b\u3002\u65e0\u8bba\u662f\u4ea7\u54c1\u7684\u8868\u9762\u8fd8\u662f\u8fb9\u7f18\uff0c\u6211\u4eec\u90fd\u80fd\u63d0\u4f9b\u4e00\u81f4\u7684\u6d82\u5c42\u8d28\u91cf\uff0c\u7279\u522b\u9002\u7528\u5916\u5f62\u8d1f\u8d23\u96f6\u4ef6\u7684\u8868\u9762\u3002\u6b64\u5916\uff0c\u6211\u4eec\u5728\u751f\u4ea7\u8fc7\u7a0b\u4e2d\u91c7\u7528\u4e86\u4e25\u683c\u7684\u63a7\u5236\u63aa\u65bd\uff0c\u4fdd\u8bc1\u4e86\u9540\u5c42\u7684\u7a33\u5b9a\u6027\u548c\u8010\u4e45\u6027\u3002<\/p>\n\n\n\n

\u6211\u4eec\u4f5c\u4e3a\u4e00\u5bb6\u6709\u591a\u5e74\u7ecf\u9a8c\u7684\u771f\u7a7a\u9540\u819c\u516c\u53f8\uff0c\u62e5\u6709\u4e13\u4e1a\u56e2\u961f\u548c\u5148\u8fdb\u8bbe\u5907\uff0c\u5e76\u81f4\u529b\u4e8e\u4e3a\u5ba2\u6237\u63d0\u4f9b\u6700\u4f73\u7684\u670d\u52a1\u3002\u6211\u4eec\u7684\u4ea7\u54c1\u4e0d\u4ec5\u627f\u8bfa\u8d28\u91cf\uff0c\u8fd8\u5145\u6ee1\u4e86\u521b\u9020\u529b\u548c\u4e2a\u6027\u5316\u3002\u4e0e\u6211\u4eec\u5408\u4f5c\uff0c\u60a8\u5c06\u83b7\u5f97\u9ad8\u54c1\u8d28\u7684\u6d82\u5c42\u4ea7\u54c1\u3002<\/p>\n\n\n\n

\u5982\u679c\u60a8\u5bf9\u6211\u4eec\u7684TiZrN\u6d82\u5c42\u4ea7\u54c1\u611f\u5174\u8da3\u6216\u6709\u4efb\u4f55\u7591\u95ee\uff0c\u8bf7\u968f\u65f6\u8054\u7cfb\u6211\u4eec\u7684\u5de5\u4f5c\u4eba\u5458\u3002\u6211\u4eec\u5c06\u7aed\u8bda\u4e3a\u60a8\u670d\u52a1\uff0c\u5e76\u4e3a\u60a8\u63d0\u4f9b\u5408\u9002\u7684\u89e3\u51b3\u65b9\u6848\u3002\u611f\u8c22\u60a8\u9009\u62e9\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u771f\u7a7a\u9540\u819c\u6709\u9650\u516c\u53f8\uff0c\u671f\u5f85\u4e0e\u60a8\u5408\u4f5c\uff01<\/p>\n\n\n\n

\"\"<\/figure>\n","protected":false},"excerpt":{"rendered":"

\u6b22\u8fce\u5149\u4e34\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u771f\u7a7a\u9540\u819c\u6709\u9650\u516c\u53f8\uff01\u6211\u4eec\u4f5c\u4e3a\u4e00\u5bb6\u4e13\u4e1a\u7684\u771f\u7a7a\u9540\u819c\u516c\u53f8\uff0c\u81f4\u529b\u4e8e\u4e3a\u60a8\u63d0\u4f9b\u9ad8\u54c1\u8d28\u7684PVD\u6d82\u5c42\u670d\u52a1\u3002\u4eca …<\/p>\n

TiZrN\u6d82\u5c42\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u6280\u672f<\/span> \u67e5\u770b\u5168\u6587 »<\/a><\/p>\n","protected":false},"author":2,"featured_media":923,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[2],"tags":[43,24,19,25],"class_list":["post-920","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-dumotech","tag-tizrn","tag-24","tag-19","tag-25"],"_links":{"self":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/920","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=920"}],"version-history":[{"count":2,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/920\/revisions"}],"predecessor-version":[{"id":925,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/920\/revisions\/925"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/media\/923"}],"wp:attachment":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=920"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=920"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=920"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}