{"id":1591,"date":"2026-09-16T15:59:42","date_gmt":"2026-09-16T07:59:42","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=1591"},"modified":"2026-09-16T15:59:42","modified_gmt":"2026-09-16T07:59:42","slug":"%e6%b0%ae%e5%8c%96%e9%92%9b%e9%ab%98%e8%80%90%e7%a3%a8%e6%b6%82%e5%b1%82-%e6%b5%81%e4%bd%93%e9%98%80%e9%97%a8%e8%a1%a8%e9%9d%a2%e7%ba%b3%e7%b1%b3%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e5%b7%a5%e8%89%ba","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=1591","title":{"rendered":"\u6c2e\u5316\u949b\u9ad8\u8010\u78e8\u6d82\u5c42 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HV800,\u4e00\u65e6\u8d34\u7d27\u9600\u82af\u8868\u9762,\u4f1a\u5728\u51e0\u4e2a\u5de5\u4f5c\u5faa\u73af\u5185\u7281\u51fa\u5212\u75d5,\u7c97\u7cd9\u5ea6\u4ece Ra0.2 \u76f4\u63a5\u9000\u5316\u5230 Ra1.6 \u4ee5\u4e0a\u3002<\/li>\n<li><strong>\u5316\u5b66\u8150\u8680<\/strong>\uff1a\u4ecb\u8d28\u542b\u6c2f\u79bb\u5b50\u3001\u542b\u786b\u6216\u5448\u9178\u78b1\u6027\u65f6,\u949d\u5316\u819c\u88ab\u7834\u574f,\u70b9\u8680\u4f18\u5148\u4ece\u5212\u75d5\u5904\u6210\u6838,\u8150\u8680\u4e0e\u78e8\u8680\u76f8\u4e92\u653e\u5927\u3002<\/li>\n<\/ul>\n<p>\u4e09\u80a1\u529b\u91cf\u540c\u65f6\u4f5c\u7528,\u57fa\u4f53\u78e8\u7a7f\u901a\u5e38\u4e0d\u662f\u5355\u4e2a\u673a\u5236,\u800c\u662f\u53e0\u52a0\u4f5c\u7528\u7684\u7ed3\u679c,\u8fd9\u4e00\u70b9\u548c\u771f\u7a7a\u6cf5\u53f6\u7247\u3001\u538b\u7f29\u673a\u9600\u7247\u6709\u76f8\u4f3c\u4e4b\u5904\u3002<\/p>\n<h2>\u6c2e\u5316\u949b\u7eb3\u7c73\u771f\u7a7a\u9540\u819c\u7684\u5de5\u827a\u539f\u7406<\/h2>\n<p>\u6c2e\u5316\u949b\u819c\u5c42\u7531\u6c2e\u5316\u949b\uff08TiN\uff09\u7ec4\u6210,\u989c\u8272\u968f\u6c2e\u542b\u91cf\u53d8\u5316\u5728\u91d1\u9ec4\u5230\u53e4\u94dc\u8272\u4e4b\u95f4\u3002\u5178\u578b\u5de5\u827a\u8def\u5f84\u662f<strong>\u591a\u5f27\u79bb\u5b50\u9540<\/strong>\u7ed3\u5408\u7eb3\u7c73\u5c3a\u5ea6\u7684\u7cbe\u7ec6\u63a7\u5236,\u5173\u952e\u53c2\u6570\u5927\u81f4\u5982\u4e0b\uff1a<\/p>\n<ul>\n<li><strong>\u771f\u7a7a\u5ea6<\/strong>\uff1a\u5de5\u4f5c\u538b\u5f3a\u901a\u5e38\u5728 0.5~2 Pa \u91cf\u7ea7,\u592a\u4f4e\u4e0d\u5229\u4e8e\u7b49\u79bb\u5b50\u4f53\u7a33\u5b9a,\u592a\u9ad8\u819c\u5c42\u6613\u6c61\u67d3\u3002<\/li>\n<li><strong>\u504f\u538b<\/strong>\uff1a-50 \u5230 -200V \u7684\u8109\u51b2\u504f\u538b\u8ba9\u79bb\u5b50\u6301\u7eed\u8f70\u51fb\u751f\u957f\u4e2d\u7684\u819c\u9762,\u6539\u5584\u81f4\u5bc6\u5ea6\u4e0e\u9644\u7740\u529b\u3002<\/li>\n<li><strong>\u5f27\u7535\u6d41<\/strong>\uff1a\u9634\u6781\u9776\u5f27\u7535\u6d41\u51b3\u5b9a\u79bb\u5316\u7387,\u6d41\u4f53\u9600\u95e8\u96f6\u4ef6\u5e38\u7528 60~120A \u4e4b\u95f4,\u65e2\u4fdd\u8bc1\u7ed5\u9540\u8986\u76d6\u9525\u9762,\u53c8\u907f\u514d\u5927\u9897\u7c92\u7f3a\u9677\u3002<\/li>\n<li><strong>\u6c89\u79ef\u6e29\u5ea6<\/strong>\uff1a400~500\u2103,\u6e29\u5ea6\u9ad8\u4e86\u819c\u5c42\u81f4\u5bc6,\u4f46\u53d8\u5f62\u98ce\u9669\u53d8\u5927;\u9600\u6746\u7c7b\u7ec6\u957f\u4ef6\u4e00\u822c\u538b\u4f4e\u6e29\u5ea6\u8d70\u6162\u901f\u6c89\u79ef\u3002<\/li>\n<li><strong>\u819c\u5c42\u539a\u5ea6<\/strong>\uff1a\u5355\u9762 2~5\u03bcm,\u53cc\u8fb9\u5408\u8ba1 4~10\u03bcm,\u591f\u7528\u5373\u53ef,\u8fc7\u539a\u53cd\u800c\u589e\u52a0\u5265\u843d\u98ce\u9669\u3002<\/li>\n<\/ul>\n<p>\u6574\u4e2a\u6d41\u7a0b\u7684<strong>\u524d\u5904\u7406<\/strong>\u90e8\u5206\u51b3\u5b9a\u4e86\u6210\u54c1\u9644\u7740\u662f\u5426\u8fc7\u5173\uff1a\u53bb\u6bdb\u523a\u4e0e\u955c\u9762\u629b\u5149\u4e4b\u540e\u662f\u591a\u9053\u8d85\u58f0\u8131\u8102\u3001\u9178\u6d17\u6d3b\u5316\u3001\u7eaf\u6c34\u6f02\u6d17\u4e0e\u70d8\u5e72,\u4efb\u4f55\u4e00\u9053\u6b8b\u7559\u6cb9\u8102\u6216\u6c27\u5316\u76ae\u90fd\u4f1a\u6210\u4e3a\u540e\u671f\u5c40\u90e8\u8d77\u76ae\u7684\u5143\u51f6\u3002<\/p>\n<h2>\u5b9e\u9645\u53ef\u91cf\u5316\u6548\u679c<\/h2>\n<p>\u4e0b\u9762\u5217\u51fa\u7684\u6570\u636e\u662f<strong>\u884c\u4e1a\u5178\u578b\u91cf\u7ea7<\/strong>,\u7528\u4e8e\u8bf4\u660e\u6539\u8fdb\u5e45\u5ea6,\u4e0d\u4ee3\u8868\u672c\u516c\u53f8\u5bf9\u7279\u5b9a\u4ea7\u54c1\u7684\u68c0\u6d4b\u7ed3\u8bba\uff1a<\/p>\n<ul>\n<li>\u819c\u5c42\u786c\u5ea6\uff1aTiN \u5e38\u89c1\u5728 HV2000~2500\uff08HV0.05 \u8f7d\u8377\uff09,\u662f\u4e0d\u9508\u94a2\u57fa\u4f53 HV150~350 \u7684 5~10 \u500d\u3002<\/li>\n<li>\u6469\u64e6\u7cfb\u6570\uff1aTiN \u5bf9\u94a2\u7684\u5e72\u6469\u64e6\u7cfb\u6570\u5728 0.4~0.55 \u533a\u95f4,\u819c\u9762\u7c97\u7cd9\u5ea6 Ra \u53ef\u63a7\u5236\u5728 0.05~0.1\u03bcm\u3002<\/li>\n<li>\u8010\u6e29\u80fd\u529b\uff1a\u7a7a\u6c14\u4e2d\u957f\u671f\u4f7f\u7528\u6e29\u5ea6\u7ea6 500\u2103,\u77ed\u65f6\u53ef\u627f\u53d7 600\u2103\u3002<\/li>\n<li>\u4e2d\u6027\u76d0\u96fe\uff1a48~96 \u5c0f\u65f6\u4e0d\u51fa\u73b0\u660e\u663e\u8150\u8680\u70b9(\u89c6\u57fa\u4f53\u4e0e\u819c\u539a\u800c\u5b9a)\u3002<\/li>\n<li>\u4f7f\u7528\u5bff\u547d\uff1a\u5728\u8282\u6d41\u51b2\u8680 + \u5fae\u91cf\u9897\u7c92\u5de5\u51b5\u4e0b,\u5e38\u89c1\u5bff\u547d\u5ef6\u957f 2~5 \u500d\u3002<\/li>\n<\/ul>\n<h2>\u9002\u7528\u573a\u666f\u4e0e\u8fb9\u754c<\/h2>\n<ul>\n<li><strong>\u9002\u5408<\/strong>\uff1a\u8282\u6d41\u9600\u3001\u8c03\u8282\u9600\u3001\u91c7\u6837\u9600\u7684\u9600\u82af\u4e0e\u9600\u5ea7\u5185\u8868\u9762,\u4ee5\u53ca\u9700\u8981\u9891\u7e41\u5f00\u95ed\u7684\u7403\u9600\/\u8776\u9600\u5bc6\u5c01\u9762\u3002<\/li>\n<li><strong>\u9002\u5408<\/strong>\uff1a\u4ecb\u8d28\u542b 0.1~3% \u9897\u7c92\u7684\u5de5\u827a\u6d41\u4f53\u8f93\u9001(\u7c92\u5f84\u4ee5 <100\u03bcm \u4e3a\u4e3b)\u3002<\/li>\n<li><strong>\u9700\u8bc4\u4f30<\/strong>\uff1a\u957f\u671f\u63a5\u89e6\u6d53\u76d0\u9178\u3001\u6c22\u6c1f\u9178\u6216\u9ad8\u6d53\u5ea6\u6c2f\u79bb\u5b50\u4ecb\u8d28,\u5efa\u8bae\u6539\u7528 CrN \u6216 DLC,\u5e76\u5148\u505a\u6d78\u6ce1\u6302\u7247\u6d4b\u8bd5\u3002<\/li>\n<li><strong>\u9700\u8bc4\u4f30<\/strong>\uff1a\u9600\u82af\u4e0e\u9600\u5ea7\u7684\u7cbe\u5bc6\u914d\u5408\u95f4\u9699\u5f88\u5c0f(<10\u03bcm),\u9540\u540e\u662f\u5426\u9700\u8981\u7cbe\u78e8\u56de\u914d,\u8981\u9540\u524d\u5c31\u786e\u8ba4\u597d\u3002<\/li>\n<li><strong>\u9700\u6ce8\u610f<\/strong>\uff1a\u957f\u5f84\u6bd4\u5927\u7684\u9600\u6746(>15:1) \u5728 500\u2103 \u91cf\u7ea7\u6e29\u5ea6\u4e0b\u9700\u63a7\u5236\u5347\u6e29\u66f2\u7ebf\u4e0e\u88c5\u5939\u65b9\u5f0f,\u9632\u6b62\u70ed\u53d8\u5f62\u8d85\u5dee\u3002<\/li>\n<\/ul>\n<h2>\u5e38\u89c1\u95ee\u9898 FAQ<\/h2>\n<p><strong>\u95ee\uff1a\u6c2e\u5316\u949b\u9540\u819c\u7684\u9600\u95e8\u80fd\u4e0d\u80fd\u7ee7\u7eed\u8f66\u524a\u4fee\u590d\uff1f<\/strong><br \/>\n\u7b54\uff1a\u5c11\u91cf\u4fee\u590d\u53ef\u4ee5,\u4f46\u4e0d\u80fd\u7528\u5207\u524a\u529b\u8fc7\u5927\u7684\u5de5\u827a\u3002\u5efa\u8bae\u7528\u7c92\u5ea6\u7ec6\u7684\u91d1\u521a\u77f3\u7802\u8f6e\u8f7b\u78e8,\u6216\u8005\u5316\u5b66\u673a\u68b0\u629b\u5149(CMP),\u8fb9\u4fee\u8fb9\u6d4b\u539a\u5ea6\u3002<\/p>\n<p><strong>\u95ee\uff1a\u9540\u819c\u540e\u4ecb\u8d28\u6d01\u51c0\u5ea6\u8981\u6c42\u4f1a\u4e0d\u4f1a\u5347\u9ad8\uff1f<\/strong><br \/>\n\u7b54\uff1a\u4f1a\u7565\u6709\u8981\u6c42\u3002\u819c\u5c42\u8868\u9762 Ra \u53ef\u63a7,\u4f46 5\u03bcm \u4ee5\u4e0a\u9897\u7c92\u4ecd\u53ef\u80fd\u5212\u4f24\u819c\u9762,\u5efa\u8bae\u5728\u9600\u95e8\u524d\u52a0\u4e00\u9053 50~100\u03bcm \u7cbe\u5ea6\u7684 Y \u578b\u6216\u7bee\u5f0f\u8fc7\u6ee4\u5668\u3002<\/p>\n<p><strong>\u95ee\uff1a\u989c\u8272\u4e0d\u4e00\u81f4\u5f71\u54cd\u4f7f\u7528\u5417\uff1f<\/strong><br 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