{"id":1553,"date":"2025-11-24T16:21:37","date_gmt":"2025-11-24T08:21:37","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=1553"},"modified":"2025-11-24T16:21:37","modified_gmt":"2025-11-24T08:21:37","slug":"%e6%b0%ae%e5%8c%96%e9%92%9b%e5%af%bc%e7%94%b5%e6%b6%82%e5%b1%82%e8%88%aa%e7%a9%ba%e9%83%a8%e4%bb%b6%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e5%8e%82%e5%ae%b6-%e6%8f%90%e4%be%9b%e8%88%aa%e7%a9%ba%e7%ba%a7","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=1553","title":{"rendered":"\u6c2e\u5316\u949b\u5bfc\u7535\u6d82\u5c42\u822a\u7a7a\u90e8\u4ef6\u771f\u7a7a\u9540\u819c\u5382\u5bb6 \u63d0\u4f9b\u822a\u7a7a\u7ea7\u9540\u819c\u5b9a\u5236\u670d\u52a1"},"content":{"rendered":"\n

\u4e00\u3001\u822a\u7a7a\u90e8\u4ef6\u5bfc\u7535\u6027\u80fd\u9700\u6c42\u4e0e\u4f20\u7edf\u6280\u672f\u5c40\u9650
1.1 \u822a\u7a7a\u90e8\u4ef6\u7684\u5bfc\u7535\u529f\u80fd\u521a\u9700
\u822a\u7a7a\u90e8\u4ef6\uff08\u96f7\u8fbe\u5929\u7ebf\u3001\u5bfc\u7535\u6ed1\u73af\u3001\u9759\u7535\u91ca\u653e\u88c5\u7f6e\u7b49\uff09\u5bf9\u5bfc\u7535\u6027\u80fd\u6709\u4e25\u82db\u8981\u6c42\uff1a\u96f7\u8fbe\u5929\u7ebf\u9700\u4f4e\u963b\u6297\uff08\u22645\u03a9\uff09\u786e\u4fdd\u4fe1\u53f7\u4f20\u8f93\u6548\u7387\uff08\u226595%\uff09\uff1b\u5bfc\u7535\u6ed1\u73af\u9700\u7a33\u5b9a\u5bfc\u7535\uff08\u63a5\u89e6\u7535\u963b\u6ce2\u52a8\u22640.01\u03a9\uff09\u4fdd\u969c\u7535\u529b\u4f20\u8f93\uff1b\u9759\u7535\u91ca\u653e\u88c5\u7f6e\u9700\u4f4e\u7535\u963b\uff08\u226410\u03a9\uff09\u5feb\u901f\u5bfc\u6563\u9759\u7535\uff08\u6d88\u6563\u65f6\u95f4\u22640.1s\uff09\u3002\u6570\u636e\u663e\u793a\uff0c\u56e0\u5bfc\u7535\u6027\u80fd\u5931\u6548\u5bfc\u81f4\u7684\u822a\u7a7a\u90e8\u4ef6\u6545\u969c\u5360\u6bd4\u8fbe 28%\uff0c\u5176\u4e2d\u96f7\u8fbe\u7cfb\u7edf\u4fe1\u53f7\u8870\u51cf\u3001\u9759\u7535\u79ef\u7d2f\u5f15\u53d1\u7684\u4e8b\u6545\u5360\u6bd4\u8d85 60%\u3002
1.2 \u6c2e\u5316\u949b\u5bfc\u7535\u6d82\u5c42\u7684\u6280\u672f\u7a81\u7834
\u4f20\u7edf\u822a\u7a7a\u5bfc\u7535\u6d82\u5c42\uff08\u5982\u9540\u91d1\u3001\u5bfc\u7535\u6f06\uff09\u5b58\u5728\u7f3a\u9677\uff1a\u9540\u91d1\u6210\u672c\u9ad8\uff08\u5355\u4ef7\u2265300 \u5143 \/\u33a1\uff09\u3001\u8010\u78e8\u6027\u5dee\uff08\u5bff\u547d\u22645000 \u6b21\u6469\u64e6\uff09\uff1b\u5bfc\u7535\u6f06\u9644\u7740\u529b\u5f31\uff08\u226430N\uff09\u3001\u9ad8\u6e29\u6613\u5931\u6548\uff08\u2265150\u2103\u6027\u80fd\u8870\u51cf\uff09\u3002\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u7814\u53d1\u7684\u6c2e\u5316\u949b\uff08TiN\uff09\u5bfc\u7535\u6d82\u5c42\u822a\u7a7a\u90e8\u4ef6\u771f\u7a7a\u9540\u819c\u6280\u672f\uff0c\u901a\u8fc7\u591a\u5f27\u79bb\u5b50\u6c89\u79ef\u5de5\u827a\u5f62\u6210 300~1000nm \u7684\u5bfc\u7535\u819c\u5c42\uff0c\u5bfc\u7535\u7387\u8fbe 1.8\u00d710\u2074~2.5\u00d710\u2074S\/m\uff0c\u786c\u5ea6 2300~2800HV\uff0c\u6210\u672c\u4ec5\u4e3a\u9540\u91d1\u7684 1\/5\uff0c\u540c\u65f6\u517c\u5177\u8010\u78e8\u3001\u8010\u9ad8\u6e29\uff08\u2264500\u2103\uff09\u7279\u6027\uff0c\u5b8c\u7f8e\u9002\u914d\u822a\u7a7a\u90e8\u4ef6\u7684\u591a\u529f\u80fd\u9700\u6c42\u3002
\u4e8c\u3001\u6c2e\u5316\u949b\u5bfc\u7535\u6d82\u5c42\u7684\u6838\u5fc3\u6027\u80fd\u53c2\u6570
2.1 \u4f18\u5f02\u7684\u5bfc\u7535\u6027\u80fd\u6307\u6807
\u7535\u5bfc\u7387\u4e0e\u963b\u6297\uff1a\u819c\u5c42\u7535\u5bfc\u7387 2.0\u00d710\u2074S\/m\uff08\u819c\u539a 500nm \u65f6\uff09\uff0c\u4f53\u79ef\u7535\u963b\u7387\u22645\u00d710\u207b\u2075\u03a9\u30fbcm\uff0c\u8f83\u5bfc\u7535\u6f06\uff081\u00d710\u00b3S\/m\uff09\u63d0\u5347 20 \u500d\uff1b\u96f7\u8fbe\u5929\u7ebf\u9540\u819c\u540e\u963b\u6297\u22643\u03a9\uff0c\u4fe1\u53f7\u4f20\u8f93\u6548\u7387\u8fbe 98% \u4ee5\u4e0a\uff0c\u4f18\u4e8e\u884c\u4e1a\u6807\u51c6\uff08\u226595%\uff09\u3002
\u63a5\u89e6\u7535\u963b\u7a33\u5b9a\u6027\uff1a\u5bfc\u7535\u6ed1\u73af\u9540\u819c\u540e\uff0c\u63a5\u89e6\u7535\u963b\u22640.005\u03a9\uff0c\u7ecf 10\u2076\u6b21\u65cb\u8f6c\u6469\u64e6\uff08\u8f6c\u901f 3000r\/min\uff09\uff0c\u7535\u963b\u6ce2\u52a8\u22640.001\u03a9\uff0c\u8fdc\u4f4e\u4e8e\u4f20\u7edf\u6d82\u5c42\u7684 0.01\u03a9 \u6ce2\u52a8\u9608\u503c\u3002
\u9759\u7535\u6d88\u6563\u80fd\u529b\uff1a\u819c\u5c42\u8868\u9762\u7535\u963b\u22648\u03a9\uff0c\u9759\u7535\u6d88\u6563\u65f6\u95f4\u22640.05s\uff0c\u53ef\u5728 0.1s \u5185\u91ca\u653e 10kV \u9759\u7535\u7535\u8377\uff0c\u6ee1\u8db3\u822a\u7a7a\u9759\u7535\u9632\u62a4\u6807\u51c6\uff08SAE ARP 5412\uff09\u3002
2.2 \u534f\u540c\u7684\u529b\u5b66\u4e0e\u73af\u5883\u6027\u80fd
\u8010\u78e8\u4e0e\u786c\u5ea6\uff1a\u7ef4\u6c0f\u786c\u5ea6 2300~2800HV\uff0c\u662f\u94dd\u5408\u91d1\u57fa\u6750\u7684 8~10 \u500d\uff1b\u6469\u64e6\u7cfb\u6570 0.13~0.17\uff0c\u7ecf MMW-1 \u78e8\u635f\u6d4b\u8bd5\uff08\u8f7d\u8377 100N\uff0c\u8f6c\u901f 500r\/min\uff09\uff0c\u78e8\u635f\u7387\u4ec5 8\u00d710\u207b\u2077mm\u00b3\/(N\u30fbm)\uff0c\u4f7f\u7528\u5bff\u547d\u8fbe 3 \u4e07\u6b21\u6469\u64e6\u4ee5\u4e0a\uff0c\u662f\u9540\u91d1\u5c42\u7684 6 \u500d\u3002
\u8010\u9ad8\u6e29\u4e0e\u6297\u6c27\u5316\uff1a\u5728 500\u2103\u9ad8\u6e29\u4e0b\u6301\u7eed\u5de5\u4f5c 1000 \u5c0f\u65f6\uff0c\u7535\u5bfc\u7387\u4e0b\u964d\u22645%\uff1b\u7ecf 400\u2103\u6c27\u5316\u6d4b\u8bd5 500 \u5c0f\u65f6\uff0c\u819c\u5c42\u589e\u91cd\u22640.3mg\/cm\u00b2\uff0c\u65e0\u5265\u843d\u73b0\u8c61\uff0c\u6ee1\u8db3\u53d1\u52a8\u673a\u8231\u5468\u8fb9\u90e8\u4ef6\u7684\u9ad8\u6e29\u9700\u6c42\u3002
\u8010\u8150\u8680\u6027\uff1a\u5728\u4e2d\u6027\u76d0\u96fe\uff085% NaCl\uff09\u6d4b\u8bd5\u4e2d\uff0c1500 \u5c0f\u65f6\u65e0\u8150\u8680\uff1b\u5728\u822a\u7a7a\u6db2\u538b\u6cb9\uff08MIL-PRF-83382\uff09\u4e2d\u6d78\u6ce1 1000 \u5c0f\u65f6\uff0c\u819c\u5c42\u5b8c\u597d\u7387 99.5%\uff0c\u63a5\u89e6\u7535\u963b\u53d8\u5316\u7387\u22642%\u3002
2.3 \u57fa\u6750\u9002\u914d\u4e0e\u5de5\u827a\u517c\u5bb9\u6027
\u591a\u57fa\u6750\u9644\u7740\uff1a\u53ef\u7a33\u5b9a\u9644\u7740\u4e8e\u94dd\u5408\u91d1\uff082A12\u30017075\uff09\u3001\u949b\u5408\u91d1\uff08TC4\uff09\u3001\u4e0d\u9508\u94a2\uff08316L\uff09\u3001\u9541\u5408\u91d1\uff08AZ91D\uff09\u7b49\u822a\u7a7a\u57fa\u6750\uff0c\u819c\u57fa\u7ed3\u5408\u529b\u226555N\uff08\u5212\u75d5\u6cd5\uff09\uff0c\u9540\u819c\u540e\u57fa\u6750\u75b2\u52b3\u5f3a\u5ea6\u4e0b\u964d\u22643%\u3002
\u590d\u6742\u7ed3\u6784\u9002\u914d\uff1a\u652f\u6301\u5f02\u5f62\u4ef6\uff08\u5982\u96f7\u8fbe\u5929\u7ebf\u66f2\u9762\u3001\u591a\u5b54\u5bfc\u7535\u6ed1\u73af\uff09\u9540\u819c\uff0c\u819c\u539a\u5747\u5300\u6027\u8bef\u5dee\u2264\u00b14%\uff0c\u5c0f\u5b54\uff08\u76f4\u5f84\u22650.5mm\uff09\u5185\u58c1\u9540\u819c\u8986\u76d6\u7387\u226595%\uff0c\u6ee1\u8db3\u822a\u7a7a\u90e8\u4ef6\u7684\u590d\u6742\u7ed3\u6784\u9700\u6c42\u3002
\u4e09\u3001\u771f\u7a7a\u9540\u819c\u5b9a\u5236\u5316\u5de5\u827a\u4e0e\u8d28\u91cf\u63a7\u5236
3.1 \u5b9a\u5236\u5316\u5de5\u827a\u8bbe\u8ba1\u6d41\u7a0b
\u9700\u6c42\u5206\u6790\uff1a\u6839\u636e\u90e8\u4ef6\u529f\u80fd\uff08\u5bfc\u7535\u3001\u8010\u78e8\u3001\u8010\u9ad8\u6e29\u7b49\uff09\u5b9a\u5236\u819c\u5c42\u65b9\u6848 \u2014\u2014 \u96f7\u8fbe\u5929\u7ebf\u4fa7\u91cd\u4f4e\u963b\u6297\uff08\u7535\u5bfc\u7387\u22652.2\u00d710\u2074S\/m\uff09\uff0c\u91c7\u7528 TiN \u7eaf\u76f8\u819c\u5c42\uff1b\u5bfc\u7535\u6ed1\u73af\u4fa7\u91cd\u8010\u78e8\u6027\uff0c\u91c7\u7528 TiN+Cr \u8fc7\u6e21\u5c42\u590d\u5408\u819c\uff1b\u9759\u7535\u91ca\u653e\u88c5\u7f6e\u4fa7\u91cd\u4f4e\u6210\u672c\uff0c\u91c7\u7528 TiN\/AlN \u68af\u5ea6\u819c\u3002
\u57fa\u6750\u9884\u5904\u7406\uff1a\u9488\u5bf9\u4e0d\u540c\u57fa\u6750\u5b9a\u5236\u65b9\u6848 \u2014\u2014 \u94dd\u5408\u91d1\u91c7\u7528 \u201c\u78f7\u9178\u9633\u6781\u6c27\u5316 + \u8d85\u58f0\u6e05\u6d17\u201d\uff08\u63d0\u5347\u7ed3\u5408\u529b\u81f3 60N\uff09\uff1b\u949b\u5408\u91d1\u91c7\u7528 \u201c\u6c22\u6c1f\u9178\u9178\u6d17 + \u7b49\u79bb\u5b50\u4f53\u6d3b\u5316\u201d\uff08\u53bb\u9664\u6c27\u5316\u5c42\uff0c\u7c97\u7cd9\u5ea6 Ra\u22640.08\u03bcm\uff09\uff1b\u78b3\u7ea4\u7ef4\u590d\u5408\u6750\u6599\u91c7\u7528 \u201c\u8868\u9762\u91d1\u5c5e\u5316\u9884\u5904\u7406\u201d\uff08\u786e\u4fdd\u5bfc\u7535\u8fde\u7eed\u6027\uff09\u3002
\u6838\u5fc3\u53c2\u6570\u8c03\u63a7\uff1a\u771f\u7a7a\u5ea6\u22642\u00d710\u207b\u2074Pa\uff0c\u949b\u9776\u7535\u6d41 110~150A\uff0c\u6c2e\u6c14\u5206\u538b 0.5~1.5Pa\uff0c\u57fa\u4f53\u504f\u538b – 160~-300V\uff0c\u6c89\u79ef\u901f\u7387 3~7nm\/min\u3002\u901a\u8fc7\u5b9e\u65f6\u76d1\u63a7\u819c\u5c42\u7535\u963b\uff08\u5728\u7ebf\u56db\u63a2\u9488\u76d1\u6d4b\uff0c\u7cbe\u5ea6 \u00b10.01\u03a9\uff09\uff0c\u52a8\u6001\u8c03\u6574\u6c2e\u6c14\u5206\u538b\uff08\u8bef\u5dee\u22640.05Pa\uff09\uff0c\u786e\u4fdd\u5bfc\u7535\u6027\u80fd\u7a33\u5b9a\u3002
3.2 \u822a\u7a7a\u7ea7\u8d28\u91cf\u7ba1\u63a7\u4f53\u7cfb
\u5bfc\u7535\u6027\u80fd\u68c0\u6d4b\uff1a\u91c7\u7528 Keithley 2450 \u6e90\u8868\u6d4b\u8bd5\u7535\u963b\uff08\u7cbe\u5ea6 \u00b10.1%\uff09\uff0cAgilent E5063A \u7f51\u7edc\u5206\u6790\u4eea\u6d4b\u8bd5\u9ad8\u9891\u963b\u6297\uff081MHz~3GHz\uff09\uff0c\u786e\u4fdd\u6bcf\u6279\u6b21\u4ea7\u54c1\u7535\u5bfc\u7387\u8fbe\u6807\u7387 100%\u3002
\u7406\u5316\u6027\u80fd\u9a8c\u8bc1\uff1a\u901a\u8fc7 SEM \u89c2\u5bdf\u819c\u5c42\u5f62\u8c8c\uff08\u65e0\u9488\u5b54\u3001\u88c2\u7eb9\uff09\uff0cXRD \u5206\u6790\u76f8\u7ec4\u6210\uff08TiN \u76f8\u5360\u6bd4\u226598%\uff09\uff0c\u7eb3\u7c73\u538b\u75d5\u4eea\u6d4b\u8bd5\u786c\u5ea6\uff0c\u6469\u64e6\u78e8\u635f\u8bd5\u9a8c\u673a\u8bc4\u4f30\u8010\u78e8\u6027\uff0c\u7ed3\u679c\u5747\u9700\u7b26\u5408\u822a\u7a7a\u6750\u6599\u6807\u51c6\uff08AMS 2486\uff09\u3002
\u53ef\u9760\u6027\u6d4b\u8bd5\uff1a\u4f9d\u636e MIL-STD-883H \u5f00\u5c55\u73af\u5883\u6d4b\u8bd5\uff0c\u5305\u62ec\u9ad8\u4f4e\u6e29\u5faa\u73af\uff08-65\u2103~150\u2103\uff0c100 \u6b21\uff09\u3001\u632f\u52a8\uff0820g \u52a0\u901f\u5ea6\uff09\u3001\u51b2\u51fb\uff08100g \u5cf0\u503c\uff09\u7b49\uff0c\u6d4b\u8bd5\u540e\u819c\u5c42\u6027\u80fd\u8870\u51cf\u7387\u22645%\uff0c\u786e\u4fdd\u6ee1\u8db3\u822a\u7a7a\u90e8\u4ef6\u5168\u751f\u547d\u5468\u671f\u9700\u6c42\u3002
\u56db\u3001\u822a\u7a7a\u90e8\u4ef6\u5b9a\u5236\u5316\u5e94\u7528\u6848\u4f8b
4.1 \u96f7\u8fbe\u5929\u7ebf\u5bfc\u7535\u6d82\u5c42\u5b9a\u5236
\u67d0\u578b\u9884\u8b66\u673a\u96f7\u8fbe\u5929\u7ebf\uff08\u57fa\u6750 7075 \u94dd\u5408\u91d1\uff09\u539f\u91c7\u7528\u9540\u91d1\u6d82\u5c42\uff0c\u6210\u672c\u9ad8\u4e14\u78e8\u635f\u5feb\uff086 \u4e2a\u6708\u9700\u66f4\u6362\uff09\u3002\u5fd7\u9633\u767e\u7eb3\u4e3a\u5176\u5b9a\u5236\u9ad8\u5bfc\u7535 TiN \u6d82\u5c42\uff08\u7535\u5bfc\u7387 2.5\u00d710\u2074S\/m\uff09\uff0c\u819c\u539a 600nm\uff0c\u963b\u6297 2.8\u03a9\uff0c\u4fe1\u53f7\u4f20\u8f93\u6548\u7387\u8fbe 98.5%\u3002\u4f7f\u7528 18 \u4e2a\u6708\u540e\uff0c\u6d82\u5c42\u78e8\u635f\u91cf\u4ec5 0.05\u03bcm\uff0c\u4fe1\u53f7\u8870\u51cf\u22641%\uff0c\u5355\u5957\u5929\u7ebf\u6210\u672c\u964d\u4f4e 70%\uff0c\u5bff\u547d\u5ef6\u957f 3 \u500d\u3002
4.2 \u5bfc\u7535\u6ed1\u73af\u8010\u78e8\u5bfc\u7535\u5b9a\u5236
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