{"id":1551,"date":"2026-03-13T16:17:23","date_gmt":"2026-03-13T08:17:23","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=1551"},"modified":"2025-11-24T16:20:07","modified_gmt":"2025-11-24T08:20:07","slug":"tin-%e7%94%b5%e7%a3%81%e5%b1%8f%e8%94%bd%e8%86%9c%e9%a3%9e%e6%9c%ba%e9%9b%b6%e4%bb%b6%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e5%8a%a0%e5%b7%a5-%e4%bf%9d%e9%9a%9c%e8%88%aa%e7%a9%ba%e9%83%a8%e4%bb%b6","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=1551","title":{"rendered":"TiN \u7535\u78c1\u5c4f\u853d\u819c\u98de\u673a\u96f6\u4ef6\u771f\u7a7a\u9540\u819c\u52a0\u5de5 \u4fdd\u969c\u822a\u7a7a\u90e8\u4ef6\u8fd0\u884c\u7a33\u5b9a\u6027"},"content":{"rendered":"\n

\u4e00\u3001\u98de\u673a\u96f6\u4ef6\u7535\u78c1\u5e72\u6270\u9690\u60a3\u4e0e\u7a33\u5b9a\u6027\u9700\u6c42
1.1 \u98de\u673a\u96f6\u4ef6\u7684\u7535\u78c1\u73af\u5883\u4e0e\u5931\u6548\u98ce\u9669
\u98de\u673a\u96f6\u4ef6\uff08\u6da1\u8f6e\u53f6\u7247\u3001\u7535\u5b50\u8fde\u63a5\u4ef6\u3001\u5bfc\u822a\u90e8\u4ef6\u7b49\uff09\u957f\u671f\u627f\u53d7\u590d\u6742\u7535\u78c1\u4e0e\u529b\u5b66\u8f7d\u8377\uff1a\u673a\u8f7d\u96f7\u8fbe\u7684\u5f3a\u7535\u78c1\u8f90\u5c04\uff08\u5cf0\u503c\u529f\u7387\u8fbe 1MW\uff09\u3001\u53d1\u52a8\u673a\u7684\u7535\u78c1\u566a\u58f0\uff08\u9891\u7387 1kHz~50MHz\uff09\u3001\u9ad8\u7a7a\u9759\u7535\u79ef\u7d2f\uff08\u7535\u538b\u8d85 10kV\uff09\u3002\u8fd9\u4e9b\u56e0\u7d20\u6613\u5bfc\u81f4\u96f6\u4ef6\u8868\u9762\u7edd\u7f18\u5c42\u51fb\u7a7f\u3001\u91d1\u5c5e\u90e8\u4ef6\u8150\u8680\u52a0\u901f\u3001\u7535\u5b50\u5143\u4ef6\u6027\u80fd\u6f02\u79fb\uff0c\u5f15\u53d1\u90e8\u4ef6\u8fd0\u884c\u4e0d\u7a33\u5b9a\uff08\u6545\u969c\u95f4\u9694\u65f6\u95f4\u2264500 \u98de\u884c\u5c0f\u65f6\uff09\uff0c\u4e25\u91cd\u5a01\u80c1\u98de\u884c\u5b89\u5168\u3002\u636e\u6c11\u822a\u6570\u636e\u7edf\u8ba1\uff0c\u98de\u673a\u96f6\u4ef6\u56e0\u7535\u78c1\u76f8\u5173\u5931\u6548\u5bfc\u81f4\u7684\u822a\u73ed\u5ef6\u8bef\u5360\u6bd4\u8fbe 20%\uff0c\u5355\u6b21\u5ef6\u8bef\u7ecf\u6d4e\u635f\u5931\u8d85 50 \u4e07\u5143\u3002
1.2 TiN \u7535\u78c1\u5c4f\u853d\u819c\u7684\u6280\u672f\u89e3\u51b3\u65b9\u6848
\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u7814\u53d1\u7684 TiN \u7535\u78c1\u5c4f\u853d\u819c\u98de\u673a\u96f6\u4ef6\u771f\u7a7a\u9540\u819c\u6280\u672f\uff0c\u901a\u8fc7\u771f\u7a7a\u591a\u5f27\u79bb\u5b50\u6c89\u79ef\u5de5\u827a\u5728\u98de\u673a\u96f6\u4ef6\u8868\u9762\u5f62\u6210 200~800nm \u7684\u7eb3\u7c73\u819c\u5c42\uff0c\u819c\u5c42\u517c\u5177\u7535\u78c1\u5c4f\u853d\uff08SE\u226535dB\uff09\u3001\u9ad8\u786c\u5ea6\uff082300~2800HV\uff09\u3001\u8010\u9ad8\u6e29\uff08\u2264500\u2103\uff09\u7b49\u6027\u80fd\uff0c\u53ef\u6709\u6548\u62b5\u5fa1\u7535\u78c1\u5e72\u6270\u4e0e\u6076\u52a3\u5de5\u51b5\u4fb5\u8680\uff0c\u4fdd\u969c\u822a\u7a7a\u90e8\u4ef6\u957f\u671f\u7a33\u5b9a\u8fd0\u884c\uff0c\u7a81\u7834\u4f20\u7edf\u9632\u62a4\u6280\u672f\u7684\u6027\u80fd\u74f6\u9888\u3002
\u4e8c\u3001TiN \u7535\u78c1\u5c4f\u853d\u819c\u7684\u6838\u5fc3\u6027\u80fd\u4e0e\u6570\u636e\u652f\u6491
2.1 \u7a33\u5b9a\u7684\u7535\u78c1\u5c4f\u853d\u80fd\u529b
\u5bbd\u9891\u5c4f\u853d\u8303\u56f4\uff1a\u5728 1MHz~10GHz \u9891\u7387\u533a\u95f4\uff0c\u5c4f\u853d\u6548\u80fd\uff08SE\uff09\u4fdd\u6301 35~50dB\uff0c\u7b26\u5408 SAE AS5412 \u822a\u7a7a\u7535\u78c1\u5c4f\u853d\u6807\u51c6\uff1b\u5728\u536b\u661f\u901a\u4fe1\u5e38\u7528\u7684 Ku \u6ce2\u6bb5\uff0812~18GHz\uff09\uff0cSE \u503c\u8fbe 42dB \u4ee5\u4e0a\uff0c\u53ef\u786e\u4fdd\u673a\u8f7d\u536b\u661f\u901a\u4fe1\u7cfb\u7edf\u4fe1\u53f7\u7a33\u5b9a\u3002
\u5bfc\u7535\u4e0e\u9759\u7535\u9632\u62a4\uff1a\u819c\u5c42\u65b9\u5757\u7535\u963b 5~18\u03a9\/\u25a1\uff08\u819c\u539a 400nm \u65f6\uff09\uff0c\u5bfc\u7535\u7387\u8fbe 2.0\u00d710\u2074S\/m\uff0c\u9759\u7535\u6d88\u6563\u65f6\u95f4\u22640.03s\uff0c\u80fd\u5feb\u901f\u91ca\u653e\u9ad8\u7a7a\u9759\u7535\uff0c\u907f\u514d\u9759\u7535\u51fb\u7a7f\u673a\u8f7d\u7535\u5b50\u96f6\u4ef6\u3002
\u7535\u78c1\u8026\u5408\u6291\u5236\uff1a\u5bf9\u7535\u78c1\u8026\u5408\u7684\u8870\u51cf\u91cf\u8fbe 30dB\uff0c\u53ef\u964d\u4f4e\u673a\u8f7d\u8bbe\u5907\u95f4\u7684\u76f8\u4e92\u5e72\u6270\uff0c\u4f7f\u822a\u7535\u7cfb\u7edf\u4fe1\u53f7\u4f20\u8f93\u6548\u7387\u63d0\u5347 25%\u3002
2.2 \u8d85\u5f3a\u7684\u73af\u5883\u8010\u53d7\u4e0e\u529b\u5b66\u6027\u80fd
\u8010\u9ad8\u6e29\u4e0e\u6297\u6c27\u5316\uff1a\u5728 500\u2103\u9ad8\u6e29\u4e0b\u6301\u7eed\u5de5\u4f5c 800 \u5c0f\u65f6\uff0c\u819c\u5c42\u65e0\u6c27\u5316\u5265\u843d\uff0c\u5c4f\u853d\u6548\u80fd\u8870\u51cf\u22641.5dB\uff1b\u7ecf 400\u2103\u6c27\u5316\u6d4b\u8bd5 1000 \u5c0f\u65f6\uff0c\u819c\u5c42\u589e\u91cd\u22640.5mg\/cm\u00b2\uff0c\u6ee1\u8db3\u53d1\u52a8\u673a\u5468\u8fb9\u96f6\u4ef6\u7684\u9ad8\u6e29\u9700\u6c42\u3002
\u8010\u78e8\u4e0e\u6297\u8150\u8680\uff1a\u819c\u5c42\u7ef4\u6c0f\u786c\u5ea6 2300~2800HV\uff0c\u6469\u64e6\u7cfb\u6570 0.12~0.16\uff0c\u7ecf 10\u2075\u6b21\u6469\u64e6\u6d4b\u8bd5\uff08\u8f7d\u8377 60N\uff09\uff0c\u78e8\u635f\u91cf\u4ec5 0.004mg\uff1b\u5728 3.5% NaCl \u76d0\u96fe\u6d4b\u8bd5\u4e2d\uff0c\u8fde\u7eed 1200 \u5c0f\u65f6\u65e0\u70b9\u8680\uff0c\u5728\u822a\u7a7a\u6db2\u538b\u6cb9\uff08MIL-PRF-83282\uff09\u4e2d\u6d78\u6ce1 720 \u5c0f\u65f6\uff0c\u819c\u5c42\u5b8c\u597d\u7387 99.6%\u3002
\u6297\u632f\u52a8\u4e0e\u51b2\u51fb\uff1a\u901a\u8fc7 MIL-STD-810G \u632f\u52a8\u6d4b\u8bd5\uff08\u9891\u7387 5~500Hz\uff0c\u52a0\u901f\u5ea6 25g\uff09\uff0c\u819c\u5c42\u65e0\u88c2\u7eb9\u3001\u65e0\u8131\u843d\uff1b\u51b2\u51fb\u6d4b\u8bd5\uff08\u534a\u6b63\u5f26\u6ce2\uff0c\u5cf0\u503c\u52a0\u901f\u5ea6 100g\uff0c\u6301\u7eed\u65f6\u95f4 6ms\uff09\u540e\uff0c\u5c4f\u853d\u6548\u80fd\u4ec5\u4e0b\u964d 1dB\uff0c\u6ee1\u8db3\u98de\u673a\u8d77\u964d\u53ca\u6e4d\u6d41\u73af\u5883\u4e0b\u7684\u529b\u5b66\u7a33\u5b9a\u6027\u8981\u6c42\u3002
2.3 \u57fa\u6750\u9002\u914d\u4e0e\u8f7b\u91cf\u5316\u4f18\u52bf
\u591a\u57fa\u6750\u517c\u5bb9\u6027\uff1a\u53ef\u7a33\u5b9a\u9644\u7740\u4e8e\u822a\u7a7a\u5e38\u7528\u57fa\u6750 \u2014\u20142024 \u94dd\u5408\u91d1\uff08\u7ed3\u5408\u529b\u226555N\uff09\u3001TC4 \u949b\u5408\u91d1\uff08\u7ed3\u5408\u529b\u226565N\uff09\u3001304 \u4e0d\u9508\u94a2\uff08\u7ed3\u5408\u529b\u226570N\uff09\u53ca\u78b3\u7ea4\u7ef4\u590d\u5408\u6750\u6599\uff08\u7ed3\u5408\u529b\u226545N\uff09\uff0c\u9540\u819c\u540e\u57fa\u6750\u529b\u5b66\u6027\u80fd\u65e0\u660e\u663e\u8870\u51cf\uff08\u6297\u62c9\u5f3a\u5ea6\u53d8\u5316\u7387\u22641.5%\uff09\u3002
\u8f7b\u91cf\u5316\u7279\u6027\uff1a\u819c\u5c42\u539a\u5ea6 200~800nm\uff0c\u5355\u4f4d\u9762\u79ef\u91cd\u91cf\u4ec5 0.5~1.2g\/cm\u00b2\uff0c\u8f83\u4f20\u7edf\u91d1\u5c5e\u9540\u5c42\u51cf\u91cd 95% \u4ee5\u4e0a\uff0c\u5355\u67b6\u98de\u673a\u96f6\u4ef6\u9540\u819c\u540e\u603b\u91cd\u91cf\u964d\u4f4e 3~5kg\uff0c\u95f4\u63a5\u63d0\u5347\u71c3\u6cb9\u6548\u7387\uff08\u6bcf\u767e\u516c\u91cc\u8282\u6cb9 0.2~0.3L\uff09\u3002
\u4e09\u3001\u771f\u7a7a\u9540\u819c\u5de5\u827a\u7ec6\u8282\u4e0e\u822a\u7a7a\u7ea7\u8d28\u91cf\u7ba1\u63a7
3.1 \u7cbe\u5bc6\u5316\u5de5\u827a\u8bbe\u8ba1\u6d41\u7a0b
\u57fa\u6750\u9884\u5904\u7406\uff1a\u9488\u5bf9\u98de\u673a\u96f6\u4ef6\u9ad8\u7cbe\u5ea6\u8981\u6c42\uff0c\u91c7\u7528 \u201c\u4e09\u7ea7\u6e05\u6d17 + \u7b49\u79bb\u5b50\u4f53\u523b\u8680\u201d \u5de5\u827a\u3002\u4e00\u7ea7\u6e05\u6d17\uff08\u78b1\u6027\u8131\u8102\uff0cpH=8~9\uff0c\u6e29\u5ea6 50\u2103\uff0c\u65f6\u95f4 15min\uff09\u53bb\u9664\u6cb9\u6c61\uff1b\u4e8c\u7ea7\u6e05\u6d17\uff08\u53bb\u79bb\u5b50\u6c34\u8d85\u58f0\uff0c\u9891\u7387 80kHz\uff0c\u65f6\u95f4 20min\uff09\u6e05\u9664\u6b8b\u7559\u836f\u5242\uff1b\u4e09\u7ea7\u6e05\u6d17\uff08\u9152\u7cbe\u84b8\u6c7d\u8131\u8102\uff0c\u7eaf\u5ea6 99.9%\uff09\u786e\u4fdd\u8868\u9762\u6d01\u51c0\u5ea6\u8fbe Class 5 \u7ea7\uff08ISO 14644-1\uff09\u3002\u7b49\u79bb\u5b50\u4f53\u523b\u8680\u91c7\u7528\u6c29\u6c14\uff08\u7eaf\u5ea6 99.999%\uff09\uff0c\u529f\u7387 500W\uff0c\u65f6\u95f4 10min\uff0c\u4f7f\u57fa\u6750\u8868\u9762\u7c97\u7cd9\u5ea6 Ra \u4ece 0.2\u03bcm \u964d\u81f3 0.05\u03bcm\uff0c\u63d0\u5347\u819c\u57fa\u7ed3\u5408\u529b\u3002
\u6838\u5fc3\u9540\u819c\u53c2\u6570\uff1a\u771f\u7a7a\u8154\u4f53\u6781\u9650\u771f\u7a7a\u5ea6\u22642\u00d710\u207b\u2074Pa\uff0c\u949b\u9776\u7eaf\u5ea6 99.99%\uff0c\u7535\u5f27\u7535\u6d41 100~140A\uff0c\u6c2e\u6c14\u5206\u538b 0.6~1.2Pa\uff0c\u57fa\u4f53\u504f\u538b – 180~-280V\uff0c\u6c89\u79ef\u901f\u7387 4~6nm\/min\u3002\u901a\u8fc7\u5b9e\u65f6\u76d1\u63a7\u7b49\u79bb\u5b50\u4f53\u5bc6\u5ea6\uff08\u226510\u00b9\u2070cm\u207b\u00b3\uff09\uff0c\u786e\u4fdd\u819c\u5c42\u6676\u7c92\u5747\u5300\uff08\u5c3a\u5bf8 20~30nm\uff09\uff0c\u5b54\u9699\u7387\uff1c0.5%\u3002
\u540e\u5904\u7406\u4f18\u5316\uff1a\u91c7\u7528\u4f4e\u6e29\u9000\u706b\uff08180\u2103\uff0c2h\uff09\u6d88\u9664\u5185\u5e94\u529b\uff0c\u914d\u5408\u79bb\u5b50\u675f\u629b\u5149\uff08\u80fd\u91cf 500eV\uff09\uff0c\u4f7f\u819c\u5c42\u8868\u9762\u5149\u6d01\u5ea6\u8fbe Ra\u22640.03\u03bcm\uff0c\u6ee1\u8db3\u822a\u7a7a\u96f6\u4ef6\u7684\u7cbe\u5bc6\u88c5\u914d\u516c\u5dee\uff08\u00b10.001mm\uff09\u3002
3.2 \u5168\u7ef4\u5ea6\u8d28\u91cf\u68c0\u6d4b\u4f53\u7cfb
\u7535\u78c1\u6027\u80fd\u68c0\u6d4b\uff1a\u4f9d\u636e SAE AS5412 \u6807\u51c6\uff0c\u4f7f\u7528 R&S ZNB40 \u77e2\u91cf\u7f51\u7edc\u5206\u6790\u4eea\uff08100kHz~40GHz\uff09\u6d4b\u8bd5\u5c4f\u853d\u6548\u80fd\uff0c\u56db\u63a2\u9488\u6cd5\uff08\u7cbe\u5ea6 \u00b10.005\u03a9\/\u25a1\uff09\u6d4b\u5b9a\u65b9\u5757\u7535\u963b\uff0c\u786e\u4fdd\u6bcf\u6279\u6b21\u4ea7\u54c1 SE \u503c\u226535dB\uff0c\u65b9\u5757\u7535\u963b\u226420\u03a9\/\u25a1\u3002
\u7406\u5316\u6027\u80fd\u9a8c\u8bc1\uff1a\u901a\u8fc7 TEM \u89c2\u5bdf\u819c\u5c42\u7eb3\u7c73\u7ed3\u6784\uff08\u6676\u683c\u95f4\u8ddd 0.21nm\uff0c\u7b26\u5408 TiN \u6807\u51c6\uff09\uff0cXRD \u5206\u6790\u76f8\u7eaf\u5ea6\uff08TiN \u76f8\u5360\u6bd4\u226599%\uff09\uff0c\u7eb3\u7c73\u538b\u75d5\u4eea\u6d4b\u8bd5\u786c\u5ea6\uff08\u22652300HV\uff09\uff0c\u5212\u75d5\u8bd5\u9a8c\u673a\u6d4b\u5b9a\u7ed3\u5408\u529b\uff08\u226550N\uff09\u3002
\u73af\u5883\u53ef\u9760\u6027\u6d4b\u8bd5\uff1a\u6309\u7167 RTCA DO-160G \u822a\u7a7a\u8bbe\u5907\u73af\u5883\u6d4b\u8bd5\u6807\u51c6\uff0c\u5b8c\u6210 – 55\u2103~125\u2103\u9ad8\u4f4e\u6e29\u5faa\u73af\uff08100 \u6b21\uff09\u3001\u76d0\u96fe\uff085% NaCl\uff0c1000h\uff09\u3001\u9709\u83cc\uff08GJB 150.10A\uff0c28 \u5929\uff09\u7b49\u6d4b\u8bd5\uff0c\u819c\u5c42\u6027\u80fd\u8870\u51cf\u7387\u22643%\uff0c\u786e\u4fdd\u9002\u5e94\u822a\u7a7a\u5168\u751f\u547d\u5468\u671f\u5de5\u51b5\u3002
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4.1 \u6da1\u8f6e\u53f6\u7247\u9540\u819c\u5e94\u7528
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