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\u771f\u7a7a\u79bb\u5b50\u6c89\u79ef\uff1a\u5728\u771f\u7a7a\u5ea6 6\u00d710\u207b\u00b3Pa \u7684\u9540\u819c\u7089\u5185\uff0c\u4ee5 99.95% \u9ad8\u7eaf\u5ea6\u949b\u9776\u4e3a\u539f\u6599\uff0c\u901a\u8fc7\u76f4\u6d41\u7535\u5f27\u653e\u7535\uff08\u7535\u6d41 65-75A\uff09\u4ea7\u751f\u9ad8\u80fd\u949b\u79bb\u5b50\uff0c\u901a\u5165\u9ad8\u7eaf\u5ea6\u6c2e\u6c14\uff08\u6d41\u91cf 35-45sccm\uff09\uff0c\u63a7\u5236\u6c89\u79ef\u6e29\u5ea6 280-350\u2103\uff08\u907f\u514d\u62c9\u65ad\u7ed3\u6784\u70ed\u53d8\u5f62\uff09\uff0c\u5728\u62c9\u65ad\u9600\u8868\u9762\u5f62\u6210\u539a\u5ea6\u5747\u5300\u7684 TiN \u9ad8\u786c\u6d82\u5c42\uff1b
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\u6d82\u5c42\u539a\u5ea6 400-600nm 300-500nm 600-800nm \u7eb3\u7c73\u6d4b\u539a\u4eea
\u8868\u9762\u786c\u5ea6 2400-2600HV\uff0850g\uff09 2200-2400HV\uff0850g\uff09 2200-2400HV\uff0850g\uff09 \u7ef4\u6c0f\u786c\u5ea6\u8ba1
\u6d82\u5c42\u7ed3\u5408\u529b \u226552MPa \u226555MPa \u226550MPa \u5212\u75d5\u6cd5
\u6469\u64e6\u7cfb\u6570 0.18\uff08\u5bf9 PTFE \u5bc6\u5c01\u4ef6\uff09 – – \u6469\u64e6\u78e8\u635f\u8bd5\u9a8c\u673a
\u8010\u76d0\u96fe\u6027\u80fd \u22651200h\uff085% NaCl\uff09 \u22651200h\uff085% NaCl\uff09 \u22651500h\uff085% NaCl\uff09 GB\/T 10125-2021
\u62c9\u65ad\u62c9\u529b\u504f\u5dee \u00b15%\uff08\u9884\u8bbe\u62c9\u529b 50-200kN\uff09 \u00b15%\uff08\u9884\u8bbe\u62c9\u529b 50-200kN\uff09 – \u62c9\u529b\u8bd5\u9a8c\u673a
\u65ad\u5f00\u540e\u6cc4\u6f0f\u7387 \u22640.005mL\/min – – \u6c26\u8d28\u8c31\u68c0\u6f0f\u4eea
\u4e3a\u9a8c\u8bc1\u6d82\u5c42\u5bf9\u62c9\u65ad\u9600\u5b89\u5168\u6027\u80fd\u7684\u63d0\u5347\uff0c\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u8054\u5408\u67d0\u7279\u79cd\u8bbe\u5907\u68c0\u6d4b\u7814\u7a76\u9662\u5f00\u5c55\u4e13\u9879\u6d4b\u8bd5\uff08\u6a21\u62df\u7f50\u8f66\u88c5\u5378\u5de5\u51b5\uff09\uff1a
\u62c9\u65ad\u53ef\u9760\u6027\u6d4b\u8bd5\uff1a\u9009\u53d6 2 \u53f0 DN80 \u62c9\u65ad\u9600\uff081 \u53f0\u672a\u9540\u819c\uff0c1 \u53f0 TiN \u9540\u819c\uff09\uff0c\u9884\u8bbe\u62c9\u65ad\u62c9\u529b 100kN\uff0c\u8fdb\u884c 50 \u6b21\u62c9\u65ad – \u590d\u4f4d\u5faa\u73af\u6d4b\u8bd5\uff1a
\u672a\u9540\u819c\u9600\u95e8\uff1a\u7b2c 30 \u6b21\u5faa\u73af\u540e\uff0c\u62c9\u65ad\u7ed3\u6784\u78e8\u635f\uff0c\u62c9\u529b\u504f\u5dee\u6269\u5927\u81f3 + 12%\uff0c\u7b2c 42 \u6b21\u5faa\u73af\u65f6\u65e0\u6cd5\u6b63\u5e38\u65ad\u5f00\uff1b
TiN \u9540\u819c\u9600\u95e8\uff1a50 \u6b21\u5faa\u73af\u540e\uff0c\u62c9\u65ad\u7ed3\u6784\u78e8\u635f\u91cf\u4ec5 0.008mm\uff0c\u62c9\u529b\u504f\u5dee\u4fdd\u6301\u5728 \u00b13% \u4ee5\u5185\uff0c\u6bcf\u6b21\u5747\u80fd\u7cbe\u51c6\u65ad\u5f00\u3002
\u65ad\u5f00\u5bc6\u5c01\u6d4b\u8bd5\uff1a\u62c9\u65ad\u540e\u91c7\u7528\u6c26\u8d28\u8c31\u68c0\u6f0f\u4eea\u68c0\u6d4b\u6cc4\u6f0f\u7387\uff1a
\u672a\u9540\u819c\u9600\u95e8\uff1a\u65ad\u5f00\u540e\u6cc4\u6f0f\u7387 0.06mL\/min\uff1b
TiN \u9540\u819c\u9600\u95e8\uff1a\u65ad\u5f00\u540e\u6cc4\u6f0f\u7387 0.002mL\/min\uff0c\u8fdc\u4f18\u4e8e\u884c\u4e1a\u6807\u51c6\u3002
\u8010\u73af\u5883\u8001\u5316\u6d4b\u8bd5\uff1a\u5c06\u9600\u95e8\u7f6e\u4e8e 40\u2103\u300195% \u6e7f\u5ea6\u30015% NaCl \u76d0\u96fe\u73af\u5883\u4e2d\u8001\u5316 1000 \u5c0f\u65f6\uff1a
\u672a\u9540\u819c\u9600\u95e8\uff1a\u9600\u4f53\u9508\u8680\u9762\u79ef\u8fbe 30%\uff0c\u62c9\u65ad\u7ed3\u6784\u5f3a\u5ea6\u4e0b\u964d 15%\uff1b
TiN \u9540\u819c\u9600\u95e8\uff1a\u9600\u4f53\u65e0\u9508\u8680\uff0c\u62c9\u65ad\u7ed3\u6784\u5f3a\u5ea6\u65e0\u8870\u51cf\uff0c\u5bc6\u5c01\u6027\u80fd\u7a33\u5b9a\u3002
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