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1.1 Ti \u7eb3\u7c73\u5c42\u7684\u7ec4\u6210\u4e0e\u663e\u5fae\u7ed3\u6784
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1.2 \u9632\u8150\u8680\u4e0e\u8010\u78e8\u673a\u7406<\/p>\n\n\n\n

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2.1 \u8bbe\u5907\u4e0e\u5de5\u827a\u53c2\u6570
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2.2 \u524d\u5904\u7406\u4e0e\u540e\u5904\u7406<\/p>\n\n\n\n

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4.1 \u81ea\u884c\u8f66\u4e0e\u9a91\u884c\u5668\u6750<\/p>\n\n\n\n

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4.2 \u5065\u8eab\u5668\u68b0<\/p>\n\n\n\n

\u5e94\u7528\u90e8\u4f4d\uff1a\u54d1\u94c3\u63e1\u628a\u3001\u62c9\u529b\u5668\u6ed1\u8f68\u3001\u8e0f\u677f\u8f74\u627f\u5ea7\uff1b
\u6027\u80fd\u6536\u76ca\uff1a\u6469\u64e6\u7cfb\u6570\u4e0b\u964d\u4f7f\u5f97\u6ed1\u52a8\u90e8\u4ef6\u8fd0\u884c\u66f4\u987a\u6ed1\uff0c\u8868\u9762\u66f4\u6613\u6e05\u6d01\uff1b\u9ad8\u786c\u5ea6\u819c\u5c42\u51cf\u5c11\u6c57\u6db2\u4e0e\u6e05\u6d01\u5242\u5e26\u6765\u7684\u5316\u5b66\u4fb5\u8680\uff1b
\u7ecf\u6d4e\u6548\u76ca\uff1a\u51cf\u5c11\u7ef4\u62a4\u9891\u7387\u548c\u66f4\u6362\u6210\u672c\uff0c\u5ef6\u957f\u8bbe\u5907\u6362\u65b0\u5468\u671f\u3002
4.3 \u7403\u62cd\u3001\u6ed1\u677f\u53ca\u5176\u4ed6\u6237\u5916\u5668\u6750<\/p>\n\n\n\n

\u5bf9\u9ad8\u51b2\u51fb\u3001\u9ad8\u78e8\u635f\u90e8\u4f4d\u8fdb\u884c\u5c40\u90e8\u6216\u6574\u4f53\u9540\u819c\uff0c\u80fd\u6709\u6548\u51cf\u5c11\u5fae\u88c2\u7eb9\u6269\u5c55\u4e0e\u8868\u9762\u75b2\u52b3\uff0c\u6539\u5584\u5916\u89c2\u8010\u4e45\u6027\u3002
\u4e94\u3001\u5de5\u827a\u8bbe\u8ba1\u4e0e\u6210\u672c\u6548\u76ca\u5206\u6790
5.1 \u5de5\u827a\u8bbe\u8ba1\u5efa\u8bae<\/p>\n\n\n\n

\u9488\u5bf9\u4e0d\u540c\u57fa\u6750\u5236\u5b9a\u5b9a\u5236\u5316\u5de5\u827a\uff1a\u94dd\u5408\u91d1\u3001\u78b3\u94a2\u3001\u4e0d\u9508\u94a2\u3001\u9541\u5408\u91d1\u548c\u5de5\u7a0b\u5851\u6599\u5e94\u91c7\u7528\u4e0d\u540c\u524d\u5904\u7406\u4e0e\u754c\u9762\u5c42\u7b56\u7565\uff1b
\u5c40\u90e8\u9540\u819c\u4e0e\u6574\u4f53\u9540\u819c\u7684\u9009\u62e9\uff1a\u5bf9\u4e8e\u5927\u6279\u91cf\u6807\u51c6\u96f6\u4ef6\uff0c\u6574\u4f53\u9540\u819c\u66f4\u7ecf\u6d4e\uff1b\u5bf9\u4e8e\u590d\u6742\u7ed3\u6784\u6216\u7f8e\u89c2\u9700\u6c42\u9ad8\u7684\u90e8\u4ef6\uff0c\u53ef\u91c7\u7528\u63a9\u6a21\u677f\u5c40\u90e8\u9540\u819c\uff1b
\u8d28\u91cf\u63a7\u5236\uff1a\u91c7\u7528\u5728\u7ebf\u819c\u539a\u6d4b\u91cf\u3001\u62c9\u4f38\/\u5212\u75d5\u6d4b\u8bd5\u3001\u76d0\u96fe\u6d4b\u8bd5\u4e0e\u663e\u5fae\u89c2\u5bdf\u4f5c\u4e3a\u5e38\u89c4\u653e\u884c\u68c0\u9a8c\u3002
5.2 \u6210\u672c\u4e0e\u6295\u8d44\u56de\u62a5<\/p>\n\n\n\n

\u5355\u4ef6\u6210\u672c\u4f30\u8ba1\u53d7\u5de5\u4ef6\u5c3a\u5bf8\u3001\u4e0a\u4ef6\u7387\u3001\u524d\u5904\u7406\u590d\u6742\u5ea6\u53ca\u819c\u539a\u5f71\u54cd\u3002\u4ee5\u4e2d\u7b49\u5c3a\u5bf8\u81ea\u884c\u8f66\u96f6\u90e8\u4ef6\u4e3a\u4f8b\uff0c\u5355\u4ef6\u9540\u819c\u52a0\u5de5\u6210\u672c\uff08\u542b\u524d\u5904\u7406\u3001\u9540\u819c\u4e0e\u68c0\u6d4b\uff09\u5927\u81f4\u5728\u6570\u5143\u81f3\u6570\u5341\u5143\u4eba\u6c11\u5e01\u4e0d\u7b49\uff1b
\u76f8\u8f83\u4e8e\u66f4\u6602\u8d35\u7684\u5316\u5b66\u9540\u6216\u590d\u6742\u8868\u9762\u5904\u7406\uff08\u5982\u70ed\u5904\u7406+\u55b7\u6d82\u590d\u5408\u65b9\u6848\uff09\uff0cPVD Ti\u7eb3\u7c73\u5c42\u5728\u7efc\u5408\u6027\u80fd\u4e0e\u5355\u4f4d\u6210\u672c\u4e0a\u5177\u6709\u7ade\u4e89\u529b\uff1b
\u901a\u8fc7\u5ef6\u957f\u4ea7\u54c1\u5bff\u547d\u3001\u964d\u4f4e\u552e\u540e\u7ef4\u4fee\u4e0e\u8fd4\u4fee\u7387\uff0c\u6574\u4f53\u7ecf\u6d4e\u6548\u76ca\u663e\u8457\uff0c\u5c24\u5176\u9002\u7528\u4e8e\u4e2d\u9ad8\u7aef\u8fd0\u52a8\u5668\u6750\u54c1\u724c\u7684\u4ef7\u503c\u63d0\u5347\u6218\u7565\u3002
\u516d\u3001\u8d28\u91cf\u63a7\u5236\u4e0e\u68c0\u6d4b\u65b9\u6cd5
6.1 \u5e38\u89c4\u68c0\u6d4b\u9879\u76ee<\/p>\n\n\n\n

\u819c\u539a\u6d4b\u91cf\uff08\u5982\u692d\u5706\u504f\u632f\u4eea\u6216\u65ad\u5c42\u6d4b\u539a\uff09\uff1b
\u8868\u9762\u663e\u5fae\u955c\u89c2\u5bdf\uff08SEM\uff09\u4e0e\u5143\u7d20\u5206\u6790\uff08EDS\uff09\u786e\u8ba4\u819c\u5c42\u6210\u5206\u4e0e\u81f4\u5bc6\u6027\uff1b
\u7ef4\u6c0f\u786c\u5ea6\u6d4b\u8bd5\u4e0e\u7eb3\u7c73\u538b\u75d5\u6d4b\u8bd5\u8bc4\u4f30\u786c\u5ea6\u4e0e\u5f39\u6027\u6a21\u91cf\uff1b
\u9644\u7740\u529b\u6d4b\u8bd5\uff08\u5212\u75d5\/\u80f6\u5e26\u5265\u79bb\uff09\uff1b
\u76d0\u96fe\u8bd5\u9a8c\uff08ASTM B117\uff09\u4e0e\u6e7f\u70ed\u5faa\u73af\u6d4b\u8bd5\u8bc4\u4f30\u9632\u8150\u8680\u6027\u80fd\uff1b
\u6469\u64e6\u78e8\u635f\u6d4b\u8bd5\uff08\u7403\u76d8\/\u5f80\u590d\u78e8\u635f\u673a\uff09\u8bc4\u4f30\u8010\u78e8\u6027\u4e0e\u6469\u64e6\u7cfb\u6570\u3002
6.2 \u8d28\u91cf\u6307\u6807\u53c2\u8003\u503c<\/p>\n\n\n\n

\u819c\u539a\uff1a300\u2013600 nm\uff1b
\u9644\u7740\u529b\uff1a4\u20135B\uff08\u4f18\u826f\uff09\uff1b
\u786c\u5ea6\uff1a\u22652000 HV\uff08\u666e\u901aTi\u5c42\uff09\uff1b
\u76d0\u96fe\u8010\u53d7\u65f6\u95f4\uff1a\u226596\u5c0f\u65f6\u65e0\u57fa\u6750\u66b4\u9732\uff08\u89c6\u57fa\u6750\u4e0e\u524d\u5904\u7406\u53ef\u8fbe240\u5c0f\u65f6\uff09\uff1b
\u6469\u64e6\u7cfb\u6570\u4e0b\u964d\uff1a\u226510%\u3002
\u4e03\u3001\u5b9e\u65bd\u6ce8\u610f\u4e8b\u9879\u4e0e\u98ce\u9669\u63a7\u5236
7.1 \u57fa\u6750\u76f8\u5bb9\u6027
\u4e0d\u540c\u91d1\u5c5e\u4e0e\u975e\u91d1\u5c5e\u57fa\u6750\u5728\u70ed\u81a8\u80c0\u7cfb\u6570\u3001\u8868\u9762\u6c27\u5316\u884c\u4e3a\u4e0a\u5b58\u5728\u5dee\u5f02\u3002\u5bf9\u4e8e\u9ad8\u67d4\u6027\u6216\u4f4e\u7194\u70b9\u6750\u6599\uff08\u5982\u67d0\u4e9b\u5de5\u7a0b\u5851\u6599\uff09\uff0c\u5e94\u63a7\u5236\u57fa\u4f53\u6e29\u5ea6\u5e76\u4f18\u5316\u6c89\u79ef\u901f\u7387\u4ee5\u9632\u6b62\u7fd8\u66f2\u6216\u57fa\u4f53\u635f\u4f24\u3002<\/p>\n\n\n\n

7.2 \u8868\u9762\u88c5\u9970\u4e0e\u989c\u8272\u7a33\u5b9a\u6027
\u94f6\u7070\u8272Ti\u7eb3\u7c73\u5c42\u867d\u7136\u5177\u6709\u91d1\u5c5e\u5149\u6cfd\uff0c\u4f46\u5728\u5916\u89c2\u8981\u6c42\u6781\u9ad8\u7684\u9ad8\u6863\u8fd0\u52a8\u5668\u6750\u4e0a\uff0c\u9700\u6ce8\u610f\u8868\u9762\u7c97\u7cd9\u5ea6\u4e0e\u53cd\u5149\u6548\u679c\u7684\u63a7\u5236\u3002\u82e5\u9700\u5f69\u8272\u6216\u66f4\u7279\u6b8a\u88c5\u9970\u6548\u679c\uff0c\u53ef\u8003\u8651\u591a\u5c42\u590d\u5408\u9540\u5c42\uff08Ti + TiN\u6216\u6c27\u5316\u5c42\uff09\u5b9e\u73b0\u3002<\/p>\n\n\n\n

7.3 \u53ef\u4fee\u590d\u6027\u4e0e\u4e8c\u6b21\u52a0\u5de5
PVD\u819c\u5c42\u4e00\u65e6\u5c40\u90e8\u635f\u4f24\uff0c\u53ef\u901a\u8fc7\u8fd4\u5de5\u518d\u9540\u6216\u5c40\u90e8\u8865\u9540\u8fdb\u884c\u4fee\u590d\u3002\u4f46\u5bf9\u4e8e\u590d\u6742\u51e0\u4f55\u6216\u5df2\u88c5\u914d\u7684\u6574\u673a\uff0c\u5c40\u90e8\u9001\u4fee\u4e0e\u8fd4\u5de5\u6210\u672c\u8f83\u9ad8\uff0c\u5efa\u8bae\u5728\u88c5\u914d\u524d\u5b8c\u6210\u5173\u952e\u90e8\u4f4d\u9540\u819c\u5de5\u4f5c\u3002<\/p>\n\n\n\n

\u516b\u3001\u7ed3\u8bba\u4e0e\u63a8\u8350
\u94f6\u7070\u8272 Ti \u7eb3\u7c73\u5c42\u901a\u8fc7PVD\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u5de5\u827a\uff0c\u4e3a\u8fd0\u52a8\u5668\u6750\u63d0\u4f9b\u4e86\u4e00\u79cd\u517c\u5177\u9632\u8150\u8680\u3001\u8010\u78e8\u635f\u4e0e\u826f\u597d\u9644\u7740\u529b\u7684\u9ad8\u6027\u80fd\u8868\u9762\u5904\u7406\u65b9\u6848\u3002\u5176\u5173\u952e\u4f18\u52bf\u5728\u4e8e\uff1a<\/p>\n\n\n\n

\u826f\u597d\u7684\u81f4\u5bc6\u6027\u4e0e\u5c4f\u969c\u6027\u80fd\uff0c\u663e\u8457\u63d0\u9ad8\u6297\u8150\u8680\u80fd\u529b\uff1b
\u9ad8\u786c\u5ea6\u4e0e\u7a33\u56fa\u9644\u7740\u529b\uff0c\u63d0\u5347\u8010\u78e8\u6027\u4e0e\u5bff\u547d\uff1b
\u5de5\u827a\u7075\u6d3b\u3001\u53ef\u5728\u591a\u79cd\u57fa\u6750\u4e0a\u5b9e\u73b0\uff0c\u9002\u5408\u91cf\u4ea7\u4e0e\u5b9a\u5236\u5316\u9700\u6c42\u3002
\u63a8\u8350\u5728\u4e0b\u5217\u60c5\u5f62\u91c7\u7528Ti\u7eb3\u7c73\u5c42\u9540\u819c\uff1a<\/p>\n\n\n\n

\u9700\u8981\u5728\u8f7b\u91cf\u5316\u91d1\u5c5e\uff08\u5982\u94dd\u5408\u91d1\uff09\u4e0a\u63d0\u9ad8\u8010\u8150\u8680\u6027\u4e0e\u75b2\u52b3\u5bff\u547d\u7684\u5173\u952e\u8fde\u63a5\u4ef6\uff1b
\u9ad8\u9891\u63a5\u89e6\u3001\u9700\u8981\u8010\u78e8\u4e0e\u4f4e\u7ef4\u62a4\u7684\u6ed1\u52a8\u3001\u6469\u64e6\u90e8\u4f4d\uff1b
\u5bf9\u8868\u9762\u91d1\u5c5e\u5149\u6cfd\u4e0e\u5de5\u4e1a\u611f\u6709\u4e00\u5b9a\u7f8e\u89c2\u8981\u6c42\u4f46\u9700\u517c\u987e\u529f\u80fd\u6027\u7684\u4ea7\u54c1\u3002
\u82e5\u9700\u9488\u5bf9\u5177\u4f53\u4ea7\u54c1\uff08\u5982\u67d0\u578b\u53f7\u8f66\u628a\u3001\u811a\u8e0f\u3001\u62e8\u7247\uff09\u8fdb\u884c\u5de5\u827a\u4f18\u5316\u3001\u6837\u4ef6\u8bd5\u9540\u4e0e\u6027\u80fd\u9a8c\u8bc1\uff0c\u5efa\u8bae\u9001\u6837\u81f3\u5177\u5907PVD\u591a\u5f27\u79bb\u5b50\u9540\u819c\u8bbe\u5907\u4e0e\u5b9e\u9a8c\u5ba4\u6d4b\u8bd5\u80fd\u529b\u7684\u5236\u9020\u5382\u8fdb\u884c\u5c0f\u6279\u8bd5\u4ea7\u548c\u73af\u5883\u6a21\u62df\u6d4b\u8bd5\uff0c\u4ee5\u83b7\u5f97\u7cbe\u51c6\u6570\u636e\u5e76\u5236\u5b9a\u91cf\u4ea7\u5de5\u827a\u53c2\u6570\u3002<\/p>\n\n\n\n

\u516c\u53f8\u4ecb\u7ecd
\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u771f\u7a7a\u9540\u819c\u6709\u9650\u516c\u53f8\u6210\u7acb\u4e8e2010\u5e74\uff0c\u662f\u4e00\u5bb6\u4e13\u4e1a\u771f\u7a7a\u9540\u819c\u52a0\u5de5\u4f01\u4e1a\uff0c\u516c\u53f8\u62e5\u6709\u96c4\u539a\u7684\u6280\u672f\u80cc\u666f\uff0c\u4e0e\u591a\u5bb6985\u9ad8\u6821\u5b9e\u9a8c\u5ba4\u6709\u5408\u4f5c\u53ca\u6280\u672f\u4ea4\u6d41\uff0c\u516c\u53f8\u6280\u672f\u4eba\u5458\u5728\u771f\u7a7a\u9540\u819c\u884c\u4e1a\u6709\u8d44\u6df1\u7ecf\u5386\u3002\u516c\u53f8\u76ee\u524d\u6709PVD\u771f\u7a7a\u591a\u5f27\u79bb\u5b50\u9540\u819c\u548c\u91d1\u521a\u77f3\u9540\u819c\u8bbe\u5907\u6570\u53f0\u3002\u9540\u5c42\u539a\u5ea6\u53ef\u5728200nm1000nm\u8303\u56f4\u5185\u9009\u62e9\uff0c\u666e\u901a\u9540\u5c42\u786c\u5ea6\u53ef\u8fbe20002500HV\u3002<\/p>\n\n\n\n

\u6b22\u8fce\u8054\u7cfb\u6211\u4eec\u54a8\u8be2<\/p>\n\n\n\n

\"\"<\/figure>\n","protected":false},"excerpt":{"rendered":"

\u968f\u7740\u4f53\u80b2\u88c5\u5907\u5411\u8f7b\u91cf\u5316\u3001\u9ad8\u5f3a\u5ea6\u548c\u957f\u5bff\u547d\u65b9\u5411\u53d1\u5c55\uff0c\u8fd0\u52a8\u5668\u6750\u7684\u8868\u9762\u6027\u80fd\u6210\u4e3a\u5f71\u54cd\u4ea7\u54c1\u53ef\u9760\u6027\u4e0e\u7528\u6237\u4f53\u9a8c\u7684\u5173\u952e\u56e0\u7d20\u3002\u8fd0\u52a8\u5668 …<\/p>\n

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