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\u771f\u7a7a\u9540\u819c\u6280\u672f\uff0c\u901a\u8fc7\u5728\u4eba\u5de5\u5173\u8282\u8868\u9762\u5f62\u6210\u9ad8\u786c\u5ea6\u3001\u4f4e\u6469\u64e6\u7684\u9632\u62a4\u6d82\u5c42\uff0c\u80fd\u5927\u5e45\u51cf\u5c11\u5173\u8282\u9762\u78e8\u635f\uff0c\u5c06\u4eba\u5de5\u5173\u8282\u7684\u9884\u671f\u4f7f\u7528\u5bff\u547d\u5ef6\u957f\u81f3 20 \u5e74\u4ee5\u4e0a\uff0c\u4e3a\u60a3\u8005\u5e26\u6765\u957f\u671f\u83b7\u76ca\u3002 TiNC \u786c\u8d28\u8010\u78e8\u819c\u7684\u6838\u5fc3\u4f18\u52bf\u6e90\u4e8e\u5176\u72ec\u7279\u7684\u6210\u5206\u7ed3\u6784\u4e0e\u4f18\u5f02\u7684\u6280\u672f\u6027\u80fd\u3002\u4ece\u6210\u5206\u6765\u770b\uff0cTiNC \u6d82\u5c42\u662f\u949b\u3001\u78b3\u3001\u6c2e\u4e09\u79cd\u5143\u7d20\u7684\u590d\u5408\u9676\u74f7\u76f8\u6d82\u5c42\uff0c\u901a\u8fc7\u8c03\u6574\u78b3\u6c2e\u6bd4\u4f8b\uff0c\u53ef\u5b9e\u73b0\u786c\u5ea6\u4e0e\u97e7\u6027\u7684\u7cbe\u51c6\u5e73\u8861 \u2014\u2014 \u5176\u7ef4\u6c0f\u786c\u5ea6\u7a33\u5b9a\u5728 2800-3200HV\uff0c\u8fdc\u9ad8\u4e8e\u4eba\u5de5\u5173\u8282\u5e38\u7528\u7684\u94b4\u94ec\u94bc\u5408\u91d1\uff08Co-Cr-Mo\uff0c\u786c\u5ea6\u7ea6 350HV\uff09\u548c\u6c27\u5316\u9506\u9676\u74f7\uff08ZrO\u2082\uff0c\u786c\u5ea6\u7ea6 1200HV\uff09\uff0c\u80fd\u6709\u6548\u62b5\u6297\u5173\u8282\u9762\u4e4b\u95f4\u7684\u63a5\u89e6\u78e8\u635f\uff1b\u540c\u65f6\uff0c\u8be5\u6d82\u5c42\u7684\u65ad\u88c2\u97e7\u6027\u8fbe 4.5MPa\u30fbm^(1\/2)\uff0c\u907f\u514d\u4e86\u4f20\u7edf\u9ad8\u786c\u5ea6\u6d82\u5c42\uff08\u5982 TiC\uff0c\u97e7\u6027\u7ea6 2.0MPa\u30fbm^(1\/2)\uff09\u6613\u8106\u88c2\u7684\u95ee\u9898\uff0c\u53ef\u627f\u53d7\u4eba\u5de5\u5173\u8282\u5728\u884c\u8d70\u3001\u8e72\u8d77\u7b49\u52a8\u4f5c\u4e2d\u7684\u51b2\u51fb\u5e94\u529b\u3002\u6469\u64e6\u7cfb\u6570\u662f\u5f71\u54cd\u4eba\u5de5\u5173\u8282\u78e8\u635f\u7684\u5173\u952e\u6307\u6807\uff0cTiNC \u6d82\u5c42\u5728\u6a21\u62df\u4f53\u6db2\u73af\u5883\uff08\u751f\u7406\u76d0\u6c34\uff09\u4e2d\u7684\u6469\u64e6\u7cfb\u6570\u4f4e\u81f3 0.18\uff0c\u4ec5\u4e3a\u94b4\u94ec\u94bc\u5408\u91d1\u7684 1\/3\uff0c\u7ecf\u78e8\u635f\u6d4b\u8bd5\uff0cTiNC \u9540\u819c\u7684\u80a1\u9aa8\u5934\u4e0e\u9acb\u81fc\u676f\u914d\u5bf9\u6469\u64e6\u65f6\uff0c\u5e74\u78e8\u635f\u91cf\u4ec5\u4e3a 0.5mm\u00b3\uff0c\u800c\u672a\u9540\u819c\u914d\u5bf9\u7684\u5e74\u78e8\u635f\u91cf\u8fbe 15mm\u00b3\uff0c\u78e8\u635f\u91cf\u4e0b\u964d 96% \u4ee5\u4e0a\uff0c\u5927\u5e45\u51cf\u5c11\u91d1\u5c5e\u788e\u5c51\u7684\u4ea7\u751f\u3002 \u5728\u4eba\u5de5\u5173\u8282\u7684\u5b9e\u9645\u5e94\u7528\u4e2d\uff0cTiNC \u786c\u8d28\u8010\u78e8\u819c\u65b9\u6848\u8fd8\u89e3\u51b3\u4e86 \u201c\u751f\u7269\u76f8\u5bb9\u6027\u201d \u4e0e \u201c\u590d\u6742\u5f62\u72b6\u9540\u819c\u201d \u4e24\u5927\u6838\u5fc3\u96be\u9898\u3002\u751f\u7269\u76f8\u5bb9\u6027\u65b9\u9762\uff0cTiNC \u6d82\u5c42\u7ecf GB\/T 16886 \u533b\u7597\u5668\u68b0\u751f\u7269\u5b66\u8bc4\u4ef7\u6d4b\u8bd5\uff0c\u7ec6\u80de\u6bd2\u6027\u7b49\u7ea7\u4e3a 0 \u7ea7\uff0c\u6eb6\u8840\u7387 &lt; 0.3%\uff0c\u4e14\u65e0\u81f4\u654f\u3001\u65e0\u9057\u4f20\u6bd2\u6027\uff0c\u80fd\u4e0e\u4eba\u4f53\u9aa8\u7ec4\u7ec7\u3001\u8f6f\u7ec4\u7ec7\u826f\u597d\u517c\u5bb9\uff0c\u907f\u514d\u51fa\u73b0\u6392\u5f02\u53cd\u5e94\uff1b\u540c\u65f6\uff0c\u6d82\u5c42\u8868\u9762\u7c97\u7cd9\u5ea6\u53ef\u63a7\u5236\u5728 Ra 0.05-0.1\u03bcm\uff0c\u51cf\u5c11\u5bf9\u5173\u8282\u5468\u56f4\u8f6f\u7ec4\u7ec7\u7684\u523a\u6fc0\u3002\u5bf9\u4e8e\u4eba\u5de5\u5173\u8282\u7684\u590d\u6742\u7ed3\u6784\uff08\u5982\u80a1\u9aa8\u5934\u9888\u90e8\u3001\u9acb\u81fc\u676f\u5185\u58c1\uff09\uff0c\u4f20\u7edf\u9540\u819c\u5de5\u827a\u6613\u51fa\u73b0\u6d82\u5c42\u8986\u76d6\u4e0d\u5747\u7684\u95ee\u9898\uff0c\u800c TiNC \u6d82\u5c42\u91c7\u7528 PVD \u591a\u5f27\u79bb\u5b50\u9540\u819c\u4e0e\u78c1\u63a7\u6e85\u5c04\u7ed3\u5408\u7684\u5de5\u827a\uff0c\u901a\u8fc7 360\u00b0 \u65cb\u8f6c\u5de5\u88c5\u4e0e\u591a\u79bb\u5b50\u6e90\u5e03\u5c40\uff0c\u53ef\u5b9e\u73b0\u6d82\u5c42\u5728\u590d\u6742\u8868\u9762\u7684\u5747\u5300\u6c89\u79ef\uff0c\u539a\u5ea6\u504f\u5dee\u5c0f\u4e8e 5%\uff08\u6d82\u5c42\u603b\u539a\u5ea6\u63a7\u5236\u5728 500-800nm\uff0c\u5904\u4e8e\u516c\u53f8 200nm-1000nm \u7684\u6807\u51c6\u8303\u56f4\uff09\uff0c\u786e\u4fdd\u5173\u8282\u5404\u90e8\u4f4d\u7684\u8010\u78e8\u6027\u80fd\u4e00\u81f4\u3002 \u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u771f\u7a7a\u9540\u819c\u6709\u9650\u516c\u53f8\u4f5c\u4e3a\u6df1\u8015\u533b\u7597\u9886\u57df\u7684\u771f\u7a7a\u9540\u819c\u4f01\u4e1a\uff0c\u81ea 2010 \u5e74\u6210\u7acb\u4ee5\u6765\uff0c\u4fbf\u5c06 TiNC \u6d82\u5c42\u6280\u672f\u4f5c\u4e3a\u4eba\u5de5\u5173\u8282\u9540\u819c\u7684\u6838\u5fc3\u65b9\u6848\u8fdb\u884c\u7814\u53d1\u5347\u7ea7\u3002\u516c\u53f8\u4f9d\u6258\u4e0e 985 \u9ad8\u6821\u5b9e\u9a8c\u5ba4\u7684\u5408\u4f5c\u8d44\u6e90\uff0c\u9488\u5bf9\u4eba\u5de5\u5173\u8282\u7684\u4f7f\u7528\u573a\u666f\uff0c\u4f18\u5316\u4e86 TiNC \u6d82\u5c42\u7684\u78b3\u6c2e\u6bd4\u4f8b\u4e0e\u6c89\u79ef\u53c2\u6570\uff0c\u4f7f\u5176\u5728\u6a21\u62df\u4f53\u6db2\u73af\u5883\u4e2d\u7684\u8010\u8150\u8680\u6027\u4e0e\u8010\u78e8\u6027\u8fdb\u4e00\u6b65\u63d0\u5347 \u2014\u2014 \u7ecf\u6d4b\u8bd5\uff0cTiNC \u9540\u819c\u7684\u94b4\u94ec\u94bc\u5408\u91d1\u8bd5\u6837\u5728\u751f\u7406\u76d0\u6c34\u4e2d\u6d78\u6ce1 5000 \u5c0f\u65f6\uff0c\u8868\u9762\u65e0\u70b9\u8680\u3001\u65e0\u5265\u843d\uff0c\u8150\u8680\u901f\u7387\u4ec5\u4e3a 0.001mm \/ \u5e74\u3002\u76ee\u524d\u516c\u53f8\u914d\u5907\u7684 PVD \u771f\u7a7a\u591a\u5f27\u79bb\u5b50\u9540\u819c\u8bbe\u5907\uff0c\u53ef\u5b9e\u73b0\u4eba\u5de5\u5173\u8282\u7684\u6279\u91cf\u9540\u819c\u52a0\u5de5\uff0c\u5355\u6279\u6b21\u53ef\u5904\u7406 200-300 \u5957\u4eba\u5de5\u5173\u8282\u7ec4\u4ef6\uff0c\u4e14\u52a0\u5de5\u5468\u671f\u63a7\u5236\u5728 7-10 \u5929\uff0c\u6ee1\u8db3\u533b\u7597\u5668\u68b0\u5382\u5546\u7684\u91cf\u4ea7\u9700\u6c42\u3002 \u9664 TiNC \u6d82\u5c42\u5916\uff0c\u897f\u5b89\u5fd7\u9633\u767e\u7eb3\u8fd8\u53ef\u63d0\u4f9b\u7c7b\u91d1\u521a\u77f3\u819c Ta-C\uff08\u786c\u5ea6 7500HV\uff0c\u6469\u64e6\u7cfb\u6570 0.08\uff09\u3001\u6c2e\u5316\u949b TiN \u7b49\u591a\u79cd\u9002\u914d\u533b\u7597\u9886\u57df\u7684\u9540\u5c42\u9009\u62e9\uff0c\u9540\u5c42\u666e\u904d\u5177\u5907\u8868\u9762\u786c\u5ea6\u9ad8\u3001\u81f4\u5bc6\u6027\u597d\u3001\u9644\u7740\u5f3a\u5ea6\u9ad8\uff08\u7ed3\u5408\u529b &gt; 50N\uff09\u7684\u7279\u70b9\uff0c\u53ef\u5728\u91d1\u5c5e\u3001\u9676\u74f7\u7b49\u57fa\u6750\u4e0a\u5b9e\u73b0\u9ad8\u8d28\u91cf\u9540\u819c\u3002\u516c\u53f8\u7684\u6280\u672f\u56e2\u961f\u5747\u62e5\u6709 10 \u5e74\u4ee5\u4e0a\u771f\u7a7a\u9540\u819c\u884c\u4e1a\u7ecf\u9a8c\uff0c\u80fd\u6839\u636e\u4eba\u5de5\u5173\u8282\u7684\u6750\u8d28\uff08\u5982\u94b4\u94ec\u94bc\u5408\u91d1\u3001\u949b\u5408\u91d1\u3001\u6c27\u5316\u9506\uff09\u4e0e\u7ed3\u6784\u7279\u70b9\uff0c\u5b9a\u5236\u4e13\u5c5e\u7684\u9540\u819c\u65b9\u6848\uff0c\u786e\u4fdd\u6d82\u5c42\u6027\u80fd\u4e0e\u5173\u8282\u4f7f\u7528\u9700\u6c42\u7cbe\u51c6\u5339\u914d\u3002<br>\u5728\u4eba\u5de5\u5173\u8282\u7f6e\u6362\u6280\u672f\u4e0d\u65ad\u53d1\u5c55\u7684\u4eca\u5929\uff0cTiNC 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