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\u4e3a\u4e86\u66f4\u76f4\u89c2\u5730\u5c55\u793aTiN\u9540\u819c\u5bf9\u77f3\u6cb9\u6cf5\u4ef6\u6027\u80fd\u7684\u63d0\u5347\uff0c\u4e0b\u9762\u5217\u51fa\u82e5\u5e72\u5178\u578b\u6848\u4f8b\u6570\u636e\uff08\u57fa\u4e8e\u6211\u53f8\u591a\u5e74\u52a0\u5de5\u7ecf\u9a8c\u4e0e\u7b2c\u4e09\u65b9\u6d4b\u8bd5\u7ed3\u679c\u6574\u5408\uff0c\u4f9b\u53c2\u8003\uff09\uff1a<\/p>\n\n\n\n

\u6848\u4f8b\u4e00\uff1a\u8f93\u6cb9\u67f1\u585e\u6cf5\u67f1\u585e\u5957\uff08\u57fa\u4f53\uff1a45# \u94a2\uff0c\u7ecf\u8fc7\u6e17\u78b3\u5904\u7406\uff09<\/p>\n\n\n\n

\u9884\u5904\u7406\uff1a\u7cbe\u5bc6\u8f66\u78e8\u540e\u8d85\u58f0\u6e05\u6d17\u2192\u79bb\u5b50\u523b\u8680\uff08Ar\uff0910 min
\u9540\u819c\u53c2\u6570\uff1a\u591a\u5f27Ti\u9776\uff0c\u7535\u6d41120 A\uff0c\u6c2e\u6c14\u6d41\u91cf40 sccm\uff0cAr 60 sccm\uff0c\u57fa\u4f53\u504f\u538b -120 V\uff0c\u6e29\u5ea6320 \u00b0C\uff0c\u6c89\u79ef\u65f6\u95f4 2.5 h
\u819c\u539a\uff1a2.2 \u00b5m\uff1b\u663e\u5fae\u786c\u5ea6\uff1a1850 HV\uff1b\u9644\u7740\u529b\uff1a\u5212\u75d5\u6d4b\u8bd5\u4e34\u754c\u8f7d\u8377 28 N
\u73b0\u573a\u7ed3\u679c\uff1a\u5728\u542b\u6c99\u91cf0.5% \u7684\u91c7\u6cb9\u4e95\u5e94\u7528 12 \u4e2a\u6708\u540e\uff0c\u67f1\u585e\u78e8\u635f\u7387\u4e0b\u964d 62%\uff0c\u6cc4\u6f0f\u53d1\u751f\u6b21\u6570\u7531\u5e73\u5747\u6bcf\u5b63\u5ea6\u4e00\u6b21\u964d\u4e3a\u6bcf\u5e74\u4e00\u6b21\u3002
\u6848\u4f8b\u4e8c\uff1a\u79bb\u5fc3\u6cf5\u53f6\u8f6e\u5bc6\u5c01\u9762\uff08\u57fa\u4f53\uff1a\u4e0d\u9508\u94a2 316L\uff09<\/p>\n\n\n\n

\u9884\u5904\u7406\uff1a\u955c\u9762\u629b\u5149 Ra = 0.03 \u00b5m \u2192 \u5316\u5b66\u6e05\u6d17 \u2192 \u79bb\u5b50\u523b\u8680
\u9540\u819c\u53c2\u6570\uff1a\u7535\u6d41 80 A\uff0c\u6c2e\/Ar \u6bd4 1:2\uff0c\u57fa\u4f53\u504f\u538b -80 V\uff0c\u6e29\u5ea6 250 \u00b0C\uff0c\u6c89\u79ef\u65f6\u95f4 1.8 h
\u819c\u539a\uff1a1.0 \u00b5m\uff1b\u8010\u8150\u8680\u6027\uff1a\u76d0\u96fe\u6d4b\u8bd5\u65e0\u660e\u663e\u70b9\u8680 240 h\uff1b\u6469\u64e6\u7cfb\u6570\uff08\u6cb9\u6da6\u6ed1\uff090.15
\u73b0\u573a\u7ed3\u679c\uff1a\u53f6\u8f6e\u5bc6\u5c01\u6cc4\u6f0f\u6b21\u6570\u51cf\u5c11 70%\uff0c\u6cf5\u6548\u7387\u63d0\u5347\u7ea6 1.8%\uff0c\u68c0\u4fee\u5468\u671f\u7531\u534a\u5e74\u5ef6\u957f\u81f318\u4e2a\u6708\u3002
\u6848\u4f8b\u4e09\uff1a\u9f7f\u8f6e\u6cf5\u9f7f\u8f6e\uff08\u57fa\u4f53\uff1a\u6e17\u78b3\u8f74\u627f\u94a2\uff09<\/p>\n\n\n\n

\u9884\u5904\u7406\uff1a\u55b7\u4e38\u2192\u8d85\u58f0\u6e05\u6d17\u2192\u79bb\u5b50\u523b\u8680
\u9540\u819c\u53c2\u6570\uff1a\u7535\u6d41 150 A\uff0c\u6c2e\u6c14\u6d41\u91cf 50 sccm\uff0c\u504f\u538b -150 V\uff0c\u6e29\u5ea6 300 \u00b0C\uff0c\u6c89\u79ef\u65f6\u95f4 3.0 h
\u819c\u539a\uff1a1.5 \u00b5m\uff1b\u9f7f\u9762\u75b2\u52b3\u5bff\u547d\u63d0\u9ad8\u7ea6 30%\uff08\u75b2\u52b3\u5faa\u73af\u8bd5\u9a8c\uff09
\u73b0\u573a\u7ed3\u679c\uff1a\u9f7f\u8f6e\u66f4\u6362\u5468\u671f\u5ef6\u957f\uff0c\u8fd0\u884c\u566a\u97f3\u964d\u4f4e\u7ea6 3 dB\u3002
\u516b\u3001\u7ecf\u6d4e\u6548\u76ca\u4e0e\u751f\u547d\u5468\u671f\u6210\u672c\u5206\u6790<\/p>\n\n\n\n

\u8868\u9762\u9540\u819c\u662f\u4e00\u9879\u6295\u5165\uff0c\u4e0e\u5176\u5e26\u6765\u7684\u5bff\u547d\u5ef6\u957f\u4e0e\u7ef4\u62a4\u6210\u672c\u4e0b\u964d\u9700\u8981\u4ece\u751f\u547d\u5468\u671f\u6210\u672c\uff08Life Cycle Cost, LCC\uff09\u89d2\u5ea6\u8bc4\u4f30\u3002\u4ee5\u6cf5\u8f74\u4e0e\u5bc6\u5c01\u9762\u4e3a\u4f8b\uff0c\u6211\u4eec\u901a\u8fc7\u7b80\u5355\u6a21\u578b\u6bd4\u8f83\u672a\u7ecf\u5904\u7406\u4e0eTiN\u9540\u819c\u5904\u7406\u540e\u7684\u7ecf\u6d4e\u6548\u76ca\uff1a<\/p>\n\n\n\n

\u521d\u6b21\u52a0\u5de5\u6210\u672c\u589e\u52a0\uff1aTiN\u9540\u819c\u6bcf\u4ef6\u6210\u672c\u89c6\u4ef6\u578b\u4e0e\u819c\u539a\u4e0d\u540c\uff0c\u901a\u5e38\u589e\u52a0\u5728 200\u20131500 \u5143\/\u4ef6\uff08\u6279\u91cf\u4e0e\u5de5\u827a\u4e0d\u540c\uff09\u3002
\u4f7f\u7528\u5bff\u547d\u5ef6\u957f\uff1a\u4f9d\u636e\u73b0\u573a\u6570\u636e\uff0c\u591a\u6570\u6cf5\u4ef6\u5bff\u547d\u53ef\u5ef6\u957f 2\u20135 \u500d\u3002
\u7ef4\u4fee\/\u66f4\u6362\u6210\u672c\u4e0b\u964d\uff1a\u66f4\u5c11\u505c\u673a\u6b21\u6570\u4e0e\u66f4\u957f\u68c0\u4fee\u95f4\u9694\uff0c\u76f4\u63a5\u964d\u4f4e\u4eba\u5de5\u3001\u5907\u4ef6\u4e0e\u505c\u673a\u9020\u6210\u7684\u4ea7\u80fd\u635f\u5931\u3002\u5bf9\u4e8e\u5173\u952e\u6cf5\u7ec4\uff08\u5355\u6b21\u505c\u673a\u6210\u672c\u53ef\u80fd\u6570\u4e07\u5143\u81f3\u6570\u5341\u4e07\u5143\uff09\uff0c\u51cf\u5c11\u4e00\u6b21\u91cd\u5927\u505c\u673a\u5373\u53ef\u6536\u56de\u591a\u6b21\u9540\u819c\u6295\u5165\u3002
\u6548\u7387\u63d0\u5347\u4e0e\u80fd\u8017\u4e0b\u964d\uff1a\u6469\u64e6\u635f\u5931\u51cf\u5c11\u5e26\u6765\u80fd\u8017\u4e0b\u964d\uff0c\u5c24\u5176\u5728\u5927\u578b\u6cf5\u7ec4\u8fde\u7eed\u8fd0\u884c\u7684\u573a\u666f\u4e0b\uff0c\u7d2f\u8ba1\u8282\u80fd\u663e\u8457\u3002
\u73af\u5883\u4e0e\u5b89\u5168\u6548\u76ca\uff1a\u51cf\u5c11\u56e0\u8bbe\u5907\u6545\u969c\u5bfc\u81f4\u7684\u6cc4\u6f0f\u3001\u4e8b\u6545\u4e0e\u73af\u5883\u6c61\u67d3\u98ce\u9669\uff0c\u95f4\u63a5\u964d\u4f4e\u516c\u53f8\u5408\u89c4\u4e0e\u6cbb\u7406\u6210\u672c\u3002
\u4e3e\u4f8b\uff1a\u67d0\u6cb9\u7530 100 \u53f0\u5173\u952e\u6cf5\u7ec4\uff0c\u6bcf\u7ec4\u5e74\u505c\u673a\u6210\u672c\uff08\u542b\u635f\u5931\u4ea7\u80fd\uff09\u4f30\u7b97\u4e3a 50,000 \u5143\uff0c\u91c7\u7528TiN\u9540\u819c\u540e\u505c\u673a\u6b21\u6570\u4ece\u6bcf\u5e742\u6b21\u4e0b\u964d\u81f30.5\u6b21\uff0c\u5219\u5e74\u8282\u7701\u505c\u673a\u6210\u672c = 100 * (2 – 0.5) * 50,000 = 7,500,000 \u5143\u3002\u5373\u4fbf\u6bcf\u53f0\u6cf5\u989d\u5916\u9540\u819c\u6210\u672c\u4e3a 2,000 \u5143\uff0c\u603b\u6295\u5165 200,000 \u5143\uff0c\u4e5f\u53ef\u5728\u77ed\u671f\u5185\u83b7\u5f97\u6781\u9ad8\u7684\u6295\u8d44\u56de\u62a5\u7387\uff08ROI\uff09\u3002<\/p>\n\n\n\n

\u4e5d\u3001\u6211\u53f8\u6280\u672f\u80fd\u529b\u4e0e\u670d\u52a1\u4fdd\u969c<\/p>\n\n\n\n

\u5728\u591a\u5f27\u79bb\u5b50\u9540\u819c\u9886\u57df\uff0c\u6211\u53f8\u62e5\u6709\u5b8c\u6574\u7684\u5de5\u827a\u4f53\u7cfb\u4e0e\u8d28\u91cf\u7ba1\u7406\u6d41\u7a0b\uff0c\u5177\u4f53\u4f18\u52bf\u5982\u4e0b\uff1a<\/p>\n\n\n\n

\u8bbe\u5907\u80fd\u529b\uff1a\u591a\u53f0\u591a\u5f27\u79bb\u5b50\u9540\u819c\u751f\u4ea7\u7ebf\uff0c\u652f\u6301\u6279\u91cf\u5316\u5904\u7406\uff0c\u6700\u5927\u53ef\u5bb9\u7eb3\u76f4\u5f84 1.5 m\u3001\u957f\u5ea6 3.0 m \u7684\u5927\u578b\u96f6\u4ef6\uff1b\u53ef\u5b9e\u73b0\u819c\u539a\u7cbe\u5ea6 \u00b10.1 \u00b5m\u3002
\u5de5\u827a\u7ecf\u9a8c\uff1a\u957f\u671f\u4e3a\u77f3\u6cb9\u673a\u68b0\u5236\u9020\u5546\u4e0e\u7ef4\u4fee\u5355\u4f4d\u63d0\u4f9bTiN\u3001TiCN\u3001CrN \u7b49\u591a\u79cd\u819c\u5c42\u5de5\u827a\uff0c\u9488\u5bf9\u67f1\u585e\u3001\u6cf5\u8f74\u3001\u53f6\u8f6e\u3001\u9f7f\u8f6e\u7b49\u6cf5\u7c7b\u96f6\u4ef6\u5efa\u7acb\u4e86\u6210\u719f\u7684\u6d41\u7a0b\u4e0e\u53c2\u6570\u5e93\u3002
\u524d\u5904\u7406\u80fd\u529b\uff1a\u63d0\u4f9b\u7cbe\u5bc6\u629b\u5149\u3001\u55b7\u4e38\u3001\u5316\u5b66\u6e05\u6d17\u3001\u79bb\u5b50\u523b\u8680\u7b49\u591a\u79cd\u524d\u5904\u7406\u670d\u52a1\uff0c\u786e\u4fdd\u819c\u5c42\u7ed3\u5408\u529b\u4e0e\u8868\u9762\u8d28\u91cf\u3002
\u68c0\u6d4b\u624b\u6bb5\uff1a\u914d\u5907SEM\u3001EDS\u3001XPS\u3001XRF\u3001\u7eb3\u7c73\u538b\u75d5\u4eea\u3001\u5212\u75d5\u6d4b\u8bd5\u4eea\u3001\u76d0\u96fe\u7bb1\u3001\u6469\u64e6\u78e8\u635f\u8bd5\u9a8c\u673a\u7b49\u68c0\u6d4b\u8bbe\u5907\uff0c\u5b9e\u73b0\u5168\u8fc7\u7a0b\u8d28\u91cf\u53ef\u8ffd\u6eaf\u3002
\u5ba2\u6237\u652f\u6301\uff1a\u63d0\u4f9b\u5de5\u7a0b\u6837\u4ef6\u8bd5\u9a8c\u3001\u73b0\u573a\u5931\u6548\u5206\u6790\u3001\u5bff\u547d\u9884\u6d4b\u4e0e\u5de5\u51b5\u4f18\u5316\u5efa\u8bae\uff0c\u652f\u6301\u5b9a\u5236\u5316\u89e3\u51b3\u65b9\u6848\u53ca\u552e\u540e\u6280\u672f\u670d\u52a1\u3002
\u5341\u3001\u5de5\u7a0b\u5efa\u8bae\u4e0e\u5b9e\u65bd\u6d41\u7a0b<\/p>\n\n\n\n

\u4e3a\u786e\u4fddTiN\u9540\u819c\u5728\u77f3\u6cb9\u6cf5\u7c7b\u96f6\u4ef6\u4e0a\u7684\u6700\u4f73\u6548\u679c\uff0c\u5efa\u8bae\u9075\u5faa\u4ee5\u4e0b\u5b9e\u65bd\u6b65\u9aa4\uff1a<\/p>\n\n\n\n

\u521d\u6b65\u8bc4\u4f30\uff1a\u63d0\u4f9b\u96f6\u4ef6\u56fe\u7eb8\u3001\u6750\u8d28\u3001\u5de5\u51b5\uff08\u538b\u529b\u3001\u6e29\u5ea6\u3001\u4ecb\u8d28\u6210\u5206\u3001\u6da6\u6ed1\u60c5\u51b5\uff09\u4e0e\u5931\u6548\u5386\u53f2\uff0c\u4ee5\u4fbf\u5de5\u7a0b\u5e08\u8fdb\u884c\u521d\u6b65\u53ef\u884c\u6027\u5206\u6790\u3002
\u8bd5\u6837\u8bbe\u8ba1\uff1a\u9009\u53d6\u5178\u578b\u96f6\u4ef6\u6216\u6837\u6761\u8fdb\u884c\u9884\u5904\u7406\u4e0eTiN\u9540\u819c\u8bd5\u9a8c\uff0c\u8bbe\u5b9a\u4e0d\u540c\u819c\u539a\u4e0e\u504f\u538b\u53c2\u6570\uff0c\u8fdb\u884c\u6469\u64e6\u78e8\u635f\u3001\u8150\u8680\u4e0e\u75b2\u52b3\u6a21\u62df\u8bd5\u9a8c\u3002
\u73b0\u573a\u5c0f\u6279\u9a8c\u8bc1\uff1a\u5728\u5b9e\u9645\u8fd0\u884c\u73af\u5883\u6216\u7b49\u6548\u6d4b\u8bd5\u53f0\u67b6\u4e0a\u5bf9\u8bd5\u6837\u8fdb\u884c\u5c0f\u6279\u91cf\u9a8c\u8bc1\uff0c\u6536\u96c6\u6570\u636e\u5e76\u4f18\u5316\u5de5\u827a\u53c2\u6570\u3002
\u653e\u5927\u751f\u4ea7\uff1a\u786e\u8ba4\u53c2\u6570\u540e\u8fdb\u5165\u6279\u91cf\u52a0\u5de5\uff0c\u5efa\u7acb\u6279\u6b21\u8bb0\u5f55\u4e0e\u8d28\u91cf\u63a7\u5236\u70b9\uff08\u5982\u819c\u539a\u3001\u786c\u5ea6\u3001\u9644\u7740\u529b\u68c0\u6d4b\uff09\u3002
\u8ddf\u8e2a\u53cd\u9988\uff1a\u5b9a\u671f\u56de\u8bbf\u7528\u6237\u3001\u6536\u96c6\u73b0\u573a\u8fd0\u884c\u6570\u636e\uff0c\u8fdb\u884c\u5bff\u547d\u5206\u6790\u4e0e\u5de5\u827a\u6301\u7eed\u6539\u8fdb\u3002
\u7ed3\u8bed<\/p>\n\n\n\n

\u6c2e\u5316\u949b\u771f\u7a7a\u9540\u819c\u5728\u77f3\u6cb9\u6cf5\u7c7b\u96f6\u4ef6\u4e0a\u7684\u5e94\u7528\uff0c\u4e0d\u4ec5\u53ef\u4ee5\u663e\u8457\u63d0\u5347\u96f6\u4ef6\u7684\u8010\u78e8\u6027\u3001\u8010\u8150\u8680\u6027\u4e0e\u6297\u75b2\u52b3\u6027\u80fd\uff0c\u8fd8\u80fd\u901a\u8fc7\u964d\u4f4e\u505c\u673a\u7387\u3001\u5ef6\u957f\u68c0\u4fee\u5468\u671f\u4e0e\u8282\u80fd\u964d\u8017\u4e3a\u4f01\u4e1a\u521b\u9020\u53ef\u89c2\u7684\u7ecf\u6d4e\u4ef7\u503c\u3002\u4f5c\u4e3a\u5177\u5907\u6210\u719f\u591a\u5f27\u79bb\u5b50\u9540\u819c\u80fd\u529b\u7684\u52a0\u5de5\u5382\uff0c\u6211\u4eec\u81f4\u529b\u4e8e\u4e3a\u77f3\u6cb9\u884c\u4e1a\u5ba2\u6237\u63d0\u4f9b\u5b9a\u5236\u5316\u7684\u8868\u9762\u5de5\u7a0b\u89e3\u51b3\u65b9\u6848\uff0c\u4ece\u524d\u5904\u7406\u3001\u5de5\u827a\u5236\u5b9a\u5230\u751f\u4ea7\u68c0\u6d4b\u4e0e\u552e\u540e\u670d\u52a1\u5f62\u6210\u95ed\u73af\uff0c\u786e\u4fdd\u6bcf\u4e00\u4ef6\u9540\u819c\u4ea7\u54c1\u90fd\u80fd\u5728\u82db\u523b\u5de5\u51b5\u4e0b\u53d1\u6325\u6700\u4f73\u6027\u80fd\u3002<\/p>\n\n\n\n

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