{"id":1404,"date":"2025-11-25T10:27:00","date_gmt":"2025-11-25T02:27:00","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=1404"},"modified":"2025-11-17T10:29:14","modified_gmt":"2025-11-17T02:29:14","slug":"%e5%a4%9a%e5%bc%a7%e7%a6%bb%e5%ad%90%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e5%9c%a8%e7%94%b5%e5%ad%90%e4%b8%8e%e9%87%91%e5%b1%9e%e9%9b%b6%e4%bb%b6%e8%a1%a8%e9%9d%a2%e5%af%bc%e7%94%b5%e5%8f%8a%e7%94%b5","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=1404","title":{"rendered":"\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u5728\u7535\u5b50\u4e0e\u91d1\u5c5e\u96f6\u4ef6\u8868\u9762\u5bfc\u7535\u53ca\u7535\u78c1\u5c4f\u853d\u4e2d\u7684\u6280\u672f\u63a8\u5e7f"},"content":{"rendered":"\n

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\u76f8\u7ed3\u6784\u4e0e\u7ed3\u6676\u6027\uff1aXRD \u7528\u4e8e\u68c0\u6d4b\u6c2e\u5316\u7269\u4e0e\u91d1\u5c5e\u76f8\u6001
\u5bfc\u7535\u6027\u6d4b\u8bd5\uff1a\u56db\u63a2\u9488\u7535\u963b\u6d4b\u91cf\u3001\u63a5\u89e6\u7535\u963b\u6d4b\u8bd5\uff08\u5355\u4f4d m\u03a9\uff09
\u9644\u7740\u529b\u6d4b\u8bd5\uff1a\u62c9\u529b\/\u5212\u683c\/\u5200\u522e\u6cd5
\u8010\u8150\u8680\u4e0e\u73af\u5883\u6d4b\u8bd5\uff1a\u4e2d\u6027\u76d0\u96fe\uff08NSS\uff09\u3001\u6e7f\u70ed\u5faa\u73af\u3001\u6e29\u5ea6\u51b2\u51fb
EMI \u5c4f\u853d\u6548\u80fd\uff1a\u57fa\u4e8e\u6807\u51c6\uff08\u5982 IEEE \u6216 IEC \u6d4b\u8bd5\u65b9\u6cd5\uff09\u5728 30 MHz\u20133 GHz \u9891\u6bb5\u6d4b\u91cf\u5c4f\u853d\u8870\u51cf\uff08\u5355\u4f4d dB\uff09
\u901a\u8fc7\u8fd9\u4e9b\u624b\u6bb5\uff0c\u6211\u4eec\u53ef\u4ee5\u4e3a\u5ba2\u6237\u63d0\u4f9b\u4ece\u6837\u54c1\u9a8c\u8bc1\u5230\u6279\u91cf\u751f\u4ea7\u7684\u5168\u6d41\u7a0b\u8d28\u91cf\u4fdd\u8bc1\uff0c\u5e76\u51fa\u5177\u68c0\u6d4b\u62a5\u544a\u4e0e\u5de5\u827a\u8ffd\u6eaf\u8bb0\u5f55\u3002<\/p>\n\n\n\n

\u6210\u529f\u6848\u4f8b\u4e0e\u5b9a\u5236\u80fd\u529b
\u6c7d\u8f66\u7535\u5b50\u63a7\u5236\u6a21\u5757\uff1a\u4e3a\u67d0\u6c7d\u8f66\u7535\u5b50\u4f9b\u5e94\u5546\u5f00\u53d1\u7684\u6c2e\u5316\u94dd\u57fa\u6563\u70ed\u58f3\u4f53\uff0c\u91c7\u7528\u591a\u5c42\u590d\u5408\u5c4f\u853d\u819c\u5c42\uff0c\u603b\u539a\u5ea6 1.2 \u03bcm\uff0c\u5c4f\u853d\u6548\u7387\u5728 100 MHz\u20131 GHz \u8303\u56f4\u5e73\u5747\u8fbe 75 dB\uff0c\u540c\u65f6\u70ed\u963b\u964d\u4f4e\u7ea6 18%\u3002
\u7cbe\u5bc6\u8fde\u63a5\u5668\u89e6\u70b9\uff1a\u4e3a\u901a\u4fe1\u8bbe\u5907\u5236\u9020\u5546\u63d0\u4f9b\u7684 Ag \u7eb3\u7c73\u590d\u5408\u819c\u89e6\u70b9\uff0c\u521d\u671f\u63a5\u89e6\u7535\u963b 2.3 m\u03a9\uff0c\u7ecf 10,000 \u6b21\u5faa\u73af\u540e\u4e3a 3.1 m\u03a9\uff0c\u5931\u6548\u7387 < 0.2%\u3002 \u533b\u7597\u5668\u68b0\u5185\u90e8\u91d1\u5c5e\u4ef6\uff1a\u901a\u8fc7 TiN \u4fdd\u62a4\u5c42\u4f7f\u91d1\u5c5e\u96f6\u4ef6\u5728\u6d88\u6bd2\u4e0e\u6e7f\u70ed\u73af\u5883\u4e0b\u4fdd\u6301 > 1 \u5e74\u7684\u8868\u9762\u7a33\u5b9a\u6027\uff0c\u8150\u8680\u4e0e\u78e8\u635f\u660e\u663e\u51cf\u5c0f\u3002
\u6211\u4eec\u53ef\u6839\u636e\u5ba2\u6237\u9700\u6c42\u8fdb\u884c\u6750\u6599\u9009\u62e9\u3001\u819c\u5c42\u8bbe\u8ba1\u4e0e\u5de5\u827a\u53c2\u6570\u4f18\u5316\uff0c\u5e76\u63d0\u4f9b\u5c0f\u6279\u6837\u54c1\u9a8c\u8bc1\u3001\u52a0\u901f\u8001\u5316\u6d4b\u8bd5\u4e0e\u91cf\u4ea7\u652f\u6301\u3002<\/p>\n\n\n\n

\u6280\u672f\u4f18\u52bf\u4e0e\u5546\u4e1a\u4ef7\u503c
\u9ad8\u9644\u7740\u529b\u4e0e\u81f4\u5bc6\u6027\uff1a\u591a\u5f27\u79bb\u5b50\u6e90\u4e0e\u79bb\u5b50\u8f70\u51fb\u589e\u5f3a\u6280\u672f\u786e\u4fdd\u819c\u5c42\u4e0e\u57fa\u6750\u5f62\u6210\u7262\u56fa\u7ed3\u5408\uff0c\u51cf\u5c11\u5265\u843d\u4e0e\u8131\u5c42\u98ce\u9669\u3002
\u4f4e\u6e29\u53ef\u52a0\u5de5\uff1a\u53ef\u5728\u4f4e\u4e8e 200\u00b0C \u7684\u6761\u4ef6\u4e0b\u5b9e\u73b0\u4f18\u826f\u819c\u5c42\uff0c\u9002\u914d\u5851\u6599\u4ef6\u4e0e\u654f\u611f\u5143\u5668\u4ef6\u3002
\u7cbe\u7ec6\u63a7\u5236\u4e0e\u53ef\u91cd\u590d\u6027\uff1a\u539a\u5ea6\u4e0e\u6210\u5206\u53ef\u63a7\u6027\u9ad8\uff0c\u9002\u5408\u6279\u91cf\u751f\u4ea7\u4e0e\u4e00\u81f4\u6027\u9700\u6c42\u3002
\u529f\u80fd\u591a\u6837\u5316\uff1a\u901a\u8fc7\u591a\u5c42\u4e0e\u7eb3\u7c73\u590d\u5408\u8bbe\u8ba1\uff0c\u53ef\u5b9e\u73b0\u5bfc\u7535\u3001\u5c4f\u853d\u3001\u8010\u78e8\u3001\u8010\u8150\u8680\u7b49\u591a\u91cd\u529f\u80fd\u53e0\u52a0\u3002
\u6210\u672c\u6548\u76ca\uff1a\u76f8\u8f83\u4e8e\u4f20\u7edf\u7535\u9540\u5de5\u827a\uff0cPVD \u5728\u73af\u4fdd\u3001\u5e9f\u6c34\u5904\u7406\u4e0e\u6750\u6599\u5229\u7528\u7387\u65b9\u9762\u5177\u6709\u663e\u8457\u4f18\u52bf\uff0c\u957f\u671f\u8fd0\u7ef4\u6210\u672c\u66f4\u4f4e\u3002
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\u9762\u5bf9\u65e5\u76ca\u4e25\u82db\u7684\u7535\u78c1\u517c\u5bb9\u4e0e\u96f6\u90e8\u4ef6\u8010\u4e45\u6027\u8981\u6c42\uff0c\u57fa\u4e8e\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u7684PVD\u7eb3\u7c73\u9540\u819c\u6280\u672f\u4e3a\u6c2e\u5316\u94dd\u7535\u78c1\u5c4f\u853d\u819c\u5c42\u548c\u7535\u5b50\u91d1\u5c5e\u96f6\u4ef6\u8868\u9762\u5bfc\u7535\u819c\u63d0\u4f9b\u4e86\u53ef\u884c\u4e14\u9ad8\u6548\u7684\u89e3\u51b3\u65b9\u6848\u3002\u6211\u53f8\u5728\u8bbe\u5907\u3001\u5de5\u827a\u3001\u68c0\u9a8c\u4e0e\u5b9a\u5236\u5316\u670d\u52a1\u65b9\u9762\u5177\u5907\u6210\u719f\u80fd\u529b\uff0c\u80fd\u591f\u4e3a\u901a\u4fe1\u3001\u6c7d\u8f66\u3001\u533b\u7597\u4e0e\u5de5\u4e1a\u7535\u5b50\u7b49\u9886\u57df\u7684\u4f01\u4e1a\u63d0\u4f9b\u4ece\u6837\u54c1\u9a8c\u8bc1\u5230\u91cf\u4ea7\u7684\u6574\u5957\u6280\u672f\u652f\u6301\u3002<\/p>\n\n\n\n

\u82e5\u60a8\u5e0c\u671b\u8fdb\u4e00\u6b65\u8bc4\u4f30\u6211\u53f8\u5de5\u827a\u5bf9\u8d35\u4ea7\u54c1\u7684\u9002\u914d\u6027\uff0c\u5efa\u8bae\u6309\u4ee5\u4e0b\u6b65\u9aa4\u5408\u4f5c\uff1a<\/p>\n\n\n\n

\u63d0\u4f9b\u6837\u4ef6\u4e0e\u6027\u80fd\u8981\u6c42\uff08\u5c4f\u853d\u8981\u6c42 dB\u3001\u63a5\u89e6\u7535\u963b\u3001\u8010\u8150\u8680\u7b49\u7ea7\u7b49\uff09\u3002
\u6211\u53f8\u8fdb\u884c\u5de5\u827a\u8bbe\u8ba1\u4e0e\u5c0f\u6279\u6837\u677f\u5236\u4f5c\uff08\u4ea4\u671f\u901a\u5e38\u4e3a 2\u20134 \u5468\uff09\u3002
\u534f\u540c\u5b8c\u6210\u529f\u80fd\u4e0e\u73af\u5883\u6d4b\u8bd5\uff0c\u4f18\u5316\u53c2\u6570\u5e76\u786e\u8ba4\u91cf\u4ea7\u5de5\u827a\u3002
\u7b7e\u8ba2\u6279\u91cf\u751f\u4ea7\u4e0e\u8d28\u91cf\u4fdd\u8bc1\u534f\u8bae\uff0c\u8fdb\u5165\u7a33\u5b9a\u4f9b\u8d27\u9636\u6bb5\u3002
\u6b22\u8fce\u5782\u8be2\u6837\u54c1\u6d4b\u8bd5\u4e0e\u6280\u672f\u4ea4\u6d41\uff0c\u6211\u4eec\u5c06\u4ee5\u4e13\u4e1a\u7684PVD\u7eb3\u7c73\u9540\u819c\u6280\u672f\u4e3a\u60a8\u7684\u4ea7\u54c1\u6027\u80fd\u63d0\u5347\u63d0\u4f9b\u5207\u5b9e\u652f\u6301\u3002<\/p>\n\n\n\n

\"\"<\/figure>\n","protected":false},"excerpt":{"rendered":"

\u968f\u7740\u7535\u5b50\u8bbe\u5907\u529f\u80fd\u7684\u4e0d\u65ad\u96c6\u6210\u4e0e\u5fae\u578b\u5316\uff0c\u7535\u78c1\u517c\u5bb9\uff08EMC\uff09\u548c\u96f6\u90e8\u4ef6\u8868\u9762\u5bfc\u7535\u6027\u6210\u4e3a\u5f71\u54cd\u4ea7\u54c1\u6027\u80fd\u4e0e\u53ef\u9760\u6027\u7684\u5173\u952e\u56e0\u7d20\u3002\u4f5c …<\/p>\n

\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u5728\u7535\u5b50\u4e0e\u91d1\u5c5e\u96f6\u4ef6\u8868\u9762\u5bfc\u7535\u53ca\u7535\u78c1\u5c4f\u853d\u4e2d\u7684\u6280\u672f\u63a8\u5e7f<\/span> \u67e5\u770b\u5168\u6587 »<\/a><\/p>\n","protected":false},"author":2,"featured_media":1380,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-gradient":""}},"footnotes":""},"categories":[2,9],"tags":[61],"class_list":["post-1404","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-dumotech","category-9","tag-61"],"_links":{"self":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/1404","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1404"}],"version-history":[{"count":1,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/1404\/revisions"}],"predecessor-version":[{"id":1405,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/posts\/1404\/revisions\/1405"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=\/wp\/v2\/media\/1380"}],"wp:attachment":[{"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1404"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1404"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.xadumo.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1404"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}