{"id":1335,"date":"2025-10-06T09:07:00","date_gmt":"2025-10-06T01:07:00","guid":{"rendered":"https:\/\/www.xadumo.com\/?p=1335"},"modified":"2025-09-22T15:48:12","modified_gmt":"2025-09-22T07:48:12","slug":"%e8%87%aa%e6%b6%a6%e6%bb%91%e8%86%9c%e5%b1%82%e5%a4%9a%e5%bc%a7%e7%a6%bb%e5%ad%90%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c%e6%8a%80%e6%9c%af%ef%bc%9a%e8%a7%a3%e5%86%b3%e5%b7%a5%e4%b8%9a%e6%91%a9%e6%93%a6","status":"publish","type":"post","link":"https:\/\/www.xadumo.com\/?p=1335","title":{"rendered":"\u81ea\u6da6\u6ed1\u819c\u5c42\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u6280\u672f\uff1a\u89e3\u51b3\u5de5\u4e1a\u6469\u64e6\u78e8\u635f\u96be\u9898\u7684\u7ec8\u6781\u65b9\u6848"},"content":{"rendered":"\n

\u5728\u73b0\u4ee3\u5de5\u4e1a\u7684\u7cbe\u5bc6\u4f20\u52a8\u7cfb\u7edf\u3001\u822a\u7a7a\u53d1\u52a8\u673a\u548c\u7cbe\u5bc6\u4eea\u5668\u4e2d\uff0c\u6469\u64e6\u78e8\u635f\u5bfc\u81f4\u7684\u96f6\u90e8\u4ef6\u5931\u6548\u5df2\u6210\u4e3a\u5236\u7ea6\u8bbe\u5907\u5bff\u547d\u4e0e\u6027\u80fd\u7684\u5173\u952e\u74f6\u9888\u3002\u4f20\u7edf\u6da6\u6ed1\u6cb9\u8102\u5728\u9ad8\u6e29\u3001\u9ad8\u901f\u6216\u771f\u7a7a\u73af\u5883\u4e0b\u8fc5\u901f\u5931\u6548\uff0c\u5bfc\u81f4\u6bcf\u5e74\u5168\u7403\u5de5\u4e1a\u9886\u57df\u56e0\u6469\u64e6\u78e8\u635f\u9020\u6210\u7684\u7ecf\u6d4e\u635f\u5931\u9ad8\u8fbe\u6570\u5343\u4ebf\u5143\u3002\u9762\u5bf9\u8fd9\u4e00\u4e25\u5cfb\u6311\u6218\uff0c\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u6280\u672f\u901a\u8fc7\u6c89\u79ef\u9ad8\u6027\u80fd\u81ea\u6da6\u6ed1\u819c\u5c42\uff0c\u4e3a\u5de5\u4e1a\u754c\u63d0\u4f9b\u4e86\u9769\u547d\u6027\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n\n\n\n

\u6838\u5fc3\u6280\u672f\uff1a\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\u7684\u539f\u7406\u4e0e\u7a81\u7834
\u591a\u5f27\u79bb\u5b50\u771f\u7a7a\u9540\u819c\uff08Multi-Arc Ion Plating\uff09\u662f\u4e00\u79cd\u57fa\u4e8e\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u7684\u5148\u8fdb\u8868\u9762\u5de5\u7a0b\u6280\u672f\u3002\u5176\u6838\u5fc3\u539f\u7406\u662f\u5728\u771f\u7a7a\u5ba4\u5185\uff08\u771f\u7a7a\u5ea6\u8fbe1.3\u00d710\u207b\u00b3 Pa\u7ea7\u522b\uff09\u901a\u8fc7\u7535\u5f27\u653e\u7535\u5c06\u9776\u6750\u91d1\u5c5e\uff08\u5982Ti\u3001Mo\u3001Cr\u7b49\uff09\u84b8\u53d1\u5e76\u79bb\u5316\uff0c\u5f62\u6210\u9ad8\u80fd\u7b49\u79bb\u5b50\u4f53\u6d41\uff0c\u6700\u7ec8\u5728\u57fa\u6750\u8868\u9762\u6c89\u79ef\u6210\u819c\u3002<\/p>\n\n\n\n

\u76f8\u8f83\u4e8e\u4f20\u7edf\u9540\u819c\u6280\u672f\uff0c\u591a\u5f27\u79bb\u5b50\u9540\u5177\u5907\u4e09\u5927\u98a0\u8986\u6027\u4f18\u52bf\uff1a<\/p>\n\n\n\n

\u9ad8\u79bb\u5316\u7387\uff1a\u91d1\u5c5e\u79bb\u5b50\u79bb\u5316\u7387\u9ad8\u8fbe60%-80%\uff0c\u79bb\u5b50\u80fd\u91cf\u663e\u8457\u63d0\u5347\uff0c\u786e\u4fdd\u819c\u5c42\u81f4\u5bc6\u5ea6\u8fdc\u8d85\u6e85\u5c04\u6216\u84b8\u53d1\u9540\u819c
\u4f4e\u6e29\u5de5\u827a\uff1a\u6c89\u79ef\u6e29\u5ea6\u4f4e\u4e8e250\u2103\uff0c\u907f\u514d\u57fa\u4f53\u6750\u6599\u70ed\u53d8\u5f62\uff0c\u9002\u7528\u4e8e\u5851\u6599\u3001\u94dd\u5408\u91d1\u7b49\u654f\u611f\u57fa\u6750
\u4e09\u7ef4\u8986\u76d6\u80fd\u529b\uff1a\u7b49\u79bb\u5b50\u4f53\u7ed5\u9540\u6027\u5f3a\uff0c\u53ef\u5747\u5300\u8986\u76d6\u9f7f\u8f6e\u5185\u5b54\u3001\u87ba\u7eb9\u7b49\u590d\u6742\u51e0\u4f55\u8868\u9762<\/p>\n\n\n\n

\u81ea\u6da6\u6ed1\u819c\u5c42\u7684\u521b\u65b0\u8bbe\u8ba1\u4e0e\u6027\u80fd\u4f18\u52bf
\u81ea\u6da6\u6ed1\u819c\u5c42\u7684\u6838\u5fc3\u4ef7\u503c\u5728\u4e8e\u5176\u80fd\u5728\u65e0\u5916\u6e90\u6da6\u6ed1\u5242\u6761\u4ef6\u4e0b\uff0c\u901a\u8fc7\u81ea\u8eab\u7ed3\u6784\u5b9e\u73b0\u6301\u7eed\u51cf\u6469\u3002\u6211\u53f8\u6280\u672f\u56e2\u961f\u5f00\u53d1\u7684\u56db\u4ee3\u81ea\u6da6\u6ed1\u819c\u5c42\u4f53\u7cfb\uff0c\u5728\u6280\u672f\u521b\u65b0\u4e0a\u5b9e\u73b0\u5173\u952e\u7a81\u7834\uff1a<\/p>\n\n\n\n

    \n
  1. \u591a\u5c42\u590d\u5408\u7ed3\u6784\u8bbe\u8ba1
    \u4ee5TiC\uff08100-150nm\uff09+TiCN\uff08100-150nm\uff09+TiAlN\uff08300-400nm\uff09 \u4e3a\u652f\u6491\u5c42\uff0c\u8868\u9762\u590d\u5408Mo\/CaF\u2082\/BaF\u2082\/C\u81ea\u6da6\u6ed1\u5c42\uff081-2\u03bcm\uff09\uff0c\u6700\u5916\u5c42\u8986\u76d6\u73bb\u7483\u5bc6\u5c01\u6d82\u5c42\uff081-2\u03bcm\uff09 1\u3002\u8fd9\u79cd\u8bbe\u8ba1\u65e2\u4fdd\u8bc1\u57fa\u4f53\u7ed3\u5408\u5f3a\u5ea6\uff08>80 N\uff09\uff0c\u53c8\u5b9e\u73b0\u68af\u5ea6\u6da6\u6ed1\u529f\u80fd\u3002<\/li>\n\n\n\n
  2. \u5bbd\u6e29\u57df\u81ea\u6da6\u6ed1\u673a\u5236
    \u4f4e\u6e29\u533a\uff08<300\u2103\uff09\uff1a\u78b3\uff08C\uff09\u7ec4\u5206\u5f62\u6210\u77f3\u58a8\u5316\u8f6c\u79fb\u819c\uff0c\u6469\u64e6\u7cfb\u6570\u964d\u81f30.1-0.15<\/li>\n<\/ol>\n\n\n\n

    \u9ad8\u6e29\u533a\uff08>400\u2103\uff09\uff1aCaF\u2082\/BaF\u2082\u5171\u6676\u76f8\u8f6f\u5316\u94fa\u5c55\uff0c\u6469\u64e6\u7cfb\u6570\u7a33\u5b9a\u57280.25-0.35<\/p>\n\n\n\n

      \n
    1. \u7eb3\u7c73\u5f3a\u5316\u6280\u672f
      \u5728MoSx\u81ea\u6da6\u6ed1\u5c42\u4e2d\u5f15\u5165\u91d1\u5c5eMo\u7eb3\u7c73\u6676\uff08\u7c92\u5f84<50nm\uff09\uff0c\u5f62\u6210Mo\u7eb3\u7c73\u6676+\u975e\u6676MoS\u2082\u590d\u5408\u7ed3\u6784\uff0c\u4f7f\u786c\u5ea6\u63d0\u5347\u81f3800-1,200HV\uff0c\u540c\u65f6\u4fdd\u6301\u6469\u64e6\u7cfb\u6570<0.35\u3002<\/li>\n<\/ol>\n\n\n\n

      \u6838\u5fc3\u6027\u80fd\u53c2\u6570\u4e0e\u5b9e\u6d4b\u6570\u636e
      \u901a\u8fc7\u4f18\u5316\u9540\u819c\u5de5\u827a\u53c2\u6570\uff08\u5f27\u7535\u6d4180-100A\uff0c\u504f\u538b-70–400V\uff0c\u6c2e\u6c14\u6d41\u91cf15-45sccm\uff09\uff0c\u81ea\u6da6\u6ed1\u819c\u5c42\u6027\u80fd\u8fbe\u5230\u884c\u4e1a\u9886\u5148\u6c34\u5e73\uff1a<\/p>\n\n\n\n

      \u6027\u80fd\u6307\u6807 \u4f20\u7edf\u9540\u819c \u6211\u53f8\u81ea\u6da6\u6ed1\u819c\u5c42 \u63d0\u5347\u5e45\u5ea6
      \u819c\u5c42\u786c\u5ea6(HV) 1,500-2,000 2,300-3,500 53%-75%
      \u6469\u64e6\u7cfb\u6570 0.5-0.65 0.08-0.35 \u964d\u4f4e45%-84%
      \u8010\u78e8\u5bff\u547d 5-8\u4e07\u6b21\u5faa\u73af >25\u4e07\u6b21\u5faa\u73af \u63d0\u5347300%
      \u6700\u9ad8\u670d\u5f79\u6e29\u5ea6 350\u2103 850\u2103 \u63d0\u5347143%
      \u6ce8\uff1a\u6570\u636e\u57fa\u4e8eASTM G99\u6807\u51c6\u6d4b\u8bd5\uff0c\u5bf9\u78e8\u6750\u6599\u4e3a\u786c\u8d28\u5408\u91d1<\/p>\n\n\n\n

      \u884c\u4e1a\u5e94\u7528\u6848\u4f8b\u4e0e\u7ecf\u6d4e\u6548\u76ca
      \u6848\u4f8b1\uff1a\u822a\u7a7a\u53d1\u52a8\u673a\u8f74\u627f\u5ef6\u5bff
      \u67d0\u578b\u53f7\u6da1\u6247\u53d1\u52a8\u673a\u4e3b\u8f74\u8f74\u627f\u539f\u91c7\u7528TiN\u9540\u819c\uff0c\u5728500\u2103\u9ad8\u6e29\u4e0b\u5de5\u4f5c\u5bff\u547d\u4ec5800\u5c0f\u65f6\u3002\u7ecf\u6211\u53f8TiAlN\/CuTiSiC\/MoSx\u590d\u5408\u81ea\u6da6\u6ed1\u819c\u5c42\u5904\u7406\u540e\uff1a<\/p>\n\n\n\n

      \u6469\u64e6\u7cfb\u6570\u964d\u81f30.18\uff08600\u2103\u5b9e\u6d4b\uff09<\/p>\n\n\n\n

      \u6297\u54ac\u5408\u8f7d\u8377\u63d0\u5347\u81f345MPa<\/p>\n\n\n\n

      \u670d\u5f79\u5bff\u547d\u7a81\u78342,500\u5c0f\u65f6<\/p>\n\n\n\n

      \u6848\u4f8b2\uff1a\u7cbe\u5bc6\u6ce8\u5851\u6a21\u5177\u589e\u6548
      \u6c7d\u8f66\u95e8\u677f\u6a21\u5177\uff08SKD61\u94a2\uff09\u539f\u6bcf15\u4e07\u6a21\u6b21\u9700\u62c6\u6a21\u629b\u5149\u3002\u91c7\u7528\u68af\u5ea6Ti-DLC\u81ea\u6da6\u6ed1\u819c\u5c42\u540e\uff1a<\/p>\n\n\n\n

      \u8131\u6a21\u529b\u4e0b\u964d40%<\/p>\n\n\n\n

      \u8fde\u7eed\u751f\u4ea780\u4e07\u6a21\u6b21\u65e0\u7c98\u6a21<\/p>\n\n\n\n

      \u5e74\u7ef4\u62a4\u6210\u672c\u51cf\u5c1156\u4e07\u5143
      \u6848\u4f8b3\uff1a\u9ad8\u7aef\u6d88\u8d39\u7535\u5b50\u5c4f\u853d\u4e00\u4f53\u5316
      \u667a\u80fd\u624b\u8868\u91d1\u5c5e\u5916\u58f3\u7ecfTiN\u81ea\u6da6\u6ed1\u88c5\u9970\u9540\u819c\uff08\u539a\u5ea60.8\u03bcm\uff09\uff1a<\/p>\n\n\n\n

      \u7535\u78c1\u5c4f\u853d\u6548\u80fd>60dB<\/p>\n\n\n\n

      \u8868\u9762\u786c\u5ea62,300HV<\/p>\n\n\n\n

      \u6469\u64e6\u7cfb\u65700.15\uff08\u4e0e\u76ae\u80a4\u63a5\u89e6\u6d4b\u8bd5\uff09<\/p>\n\n\n\n

      \u5b9e\u73b0\u8010\u78e8+\u5c4f\u853d+\u89e6\u611f\u8212\u9002\u4e09\u91cd\u529f\u80fd\u878d\u5408<\/p>\n\n\n\n

      \u5b9a\u5236\u5316\u9540\u819c\u89e3\u51b3\u65b9\u6848
      \u4f9d\u6258\u03a61,600\u00d71,300mm\u5927\u578b\u9540\u819c\u5ba4\u300114\u5f27\u6e90\u9635\u5217\u53ca\u53d8\u9891\u65cb\u8f6c\u5de5\u4ef6\u67b6\uff080-20rpm\u65e0\u7ea7\u8c03\u901f\uff09\u7b49\u6838\u5fc3\u8bbe\u5907\uff0c\u6211\u4eec\u63d0\u4f9b\u5168\u65b9\u4f4d\u9540\u819c\u670d\u52a1\uff1a<\/p>\n\n\n\n

        \n
      1. \u819c\u5c42\u4f53\u7cfb\u7075\u6d3b\u914d\u7f6e
        \u819c\u7cfb\u7c7b\u578b \u4ee3\u8868\u819c\u5c42 \u786c\u5ea6(HV) \u6469\u64e6\u7cfb\u6570 \u9002\u7528\u573a\u666f
        \u6c2e\u5316\u7269\u7cfb TiN\/TiAlN\/CrN 2,300-2,600 0.5-0.65 \u5200\u5177\u3001\u6a21\u5177
        \u78b3\u57fa\u819c\u7cfb DLC\/Ti-DLC 3,000-3,500 0.1-0.15 \u7cbe\u5bc6\u8f74\u627f
        \u786b\u5316\u7269\u7cfb MoSx\/WS\u2082 800-1,200 0.08-0.12 \u771f\u7a7a\u6ed1\u52a8\u90e8\u4ef6
        \u6c1f\u5316\u7269\u590d\u5408\u7cfb Mo\/CaF\u2082\/BaF\u2082\/C 1,500-1,800 0.2-0.35 \u9ad8\u6e29\u8fd0\u52a8\u526f<\/li>\n\n\n\n
      2. \u5168\u6d41\u7a0b\u5de5\u827a\u4fdd\u969c
        \u57fa\u4f53\u9884\u5904\u7406\uff1a\u91d1\u521a\u77f3\u629b\u5149\uff080.1\u03bcm\uff09+\u4e09\u7ea7\u8d85\u58f0\u6e05\u6d17\uff08\u9178\/\u78b1\/\u6709\u673a\uff09<\/li>\n<\/ol>\n\n\n\n

        \u79bb\u5b50\u8f70\u51fb\u5f3a\u5316\uff1a-1,000V\u504f\u538b\u6c29\u79bb\u5b50\u6e05\u6d17\uff0c\u63d0\u5347\u819c\u57fa\u7ed3\u5408\u529b>30%<\/p>\n\n\n\n

        \u667a\u80fd\u63a7\u5236\u7cfb\u7edf\uff1aPLC+\u89e6\u6478\u5c4f\u5b9e\u73b0\u771f\u7a7a\u5ea6\u3001\u6c14\u4f53\u6d41\u91cf\u3001\u504f\u538b\u7684\u95ed\u73af\u63a7\u5236<\/p>\n\n\n\n

        \u9762\u5411\u672a\u6765\u7684\u6280\u672f\u6f14\u8fdb
        \u968f\u7740\u9ad8\u7aef\u88c5\u5907\u5bf9\u53ef\u9760\u6027\u8981\u6c42\u7684\u4e0d\u65ad\u63d0\u5347\uff0c\u81ea\u6da6\u6ed1\u819c\u5c42\u6280\u672f\u6b63\u5411\u667a\u80fd\u5316\u3001\u591a\u529f\u80fd\u5316\u65b9\u5411\u6f14\u8fdb\uff1a<\/p>\n\n\n\n

        \u73af\u5883\u54cd\u5e94\u578b\u6da6\u6ed1\u819c\uff1a\u7814\u53d1\u6e29\u654f\/\u529b\u654f\u81ea\u9002\u5e94\u819c\u5c42\uff0c\u5b9e\u73b0\u5728\u4e0d\u540c\u5de5\u51b5\u4e0b\u7684\u6469\u64e6\u7cfb\u6570\u52a8\u6001\u8c03\u8282<\/p>\n\n\n\n

        \u7eb3\u7c73\u590d\u5408\u5f3a\u5316\uff1a\u91c7\u7528\u77f3\u58a8\u70ef\u589e\u5f3aDLC\u819c\u5c42\uff0c\u76ee\u6807\u5c06\u786c\u5ea6\u63d0\u5347\u81f34,500HV\u540c\u65f6\u4fdd\u6301\u6469\u64e6\u7cfb\u6570<0.1<\/p>\n\n\n\n

        \u6570\u5b57\u5b6a\u751f\u9540\u819c\uff1a\u5efa\u7acb\u5de5\u827a\u53c2\u6570-\u819c\u5c42\u6027\u80fdAI\u9884\u6d4b\u6a21\u578b\uff0c\u7f29\u77ed\u65b0\u54c1\u5f00\u53d1\u5468\u671f50%\u4ee5\u4e0a
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